Reflective anode for organic el display and application thereof

Abstract

The invention provides a reflective anode for an organic EL display and application thereof. The reflective anode comprises a laminate structure which comprises an Al-Ge series alloy film, and an oxide conductive film that contacts with the Al-Ge series alloy film, and furthermore the contact interface comprises a layer with aluminum oxide as a main component. Furthermore the Al-Ge series alloy film comprises 0.1atom%-2.5atom% of Ge. Furthermore the contact interface between the Al-Ge series alloy film and the oxide conductive film is provided with a Ge enriched layer and a deposit which comprises the Ge. The average Ge concentration in a range of 50nm from the conductive film side surface of the oxide in the Al-Ge series alloy film is above two times of the average Ge concentration in theAl-Ge series alloy film. Furthermore the average diameter of the deposit which comprises the Ge is above 0.1 [mu]m.

Description

technical field [0001] The invention relates to a reflective anode electrode, a thin film transistor substrate, an organic EL display and a sputtering target used in an organic electroluminescence (EL) display (especially a top emission (Top Emission) type). Background technique [0002] Organic EL (Organic Electro-Luminescence) display, one of self-luminous flat-panel displays, is an all-solid-state display formed by arranging organic EL elements in a matrix on a substrate such as a glass plate. type flat panel display. In an organic EL display, an anode (anode) and a cathode (cathode) are formed in stripes, and these intersecting portions correspond to pixels (organic EL elements). Applying a voltage of several volts (V) from the outside to the organic EL element and passing a current pushes the organic molecules into an excited state, and when they return to their original ground state (stable state), the excess energy is emitted as light. The luminescent color is inher...

AI Technical Summary

Problems solved by technology

[0009] However, when the Al reflective film is directly contacted with an oxide conductive film such as ITO or IZO, the contact resistance (contact resistance) is high, and sufficient current cannot be supplied to the hole injection into the organic EL element.

If the reflective film is not made of Al but a high-melting-point metal such as Mo or Cr is used to avoid the above situation, or a high-melting-point metal such as Mo or Cr is placed between the Al reflective film and the oxide conductive film as a barrier metal (barrier metal) , then the reflectivity deteriorates significantly, leading to a decrease in luminance, which is a characteristic of the display.

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