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Flexible pressure sensor and making method thereof

A pressure sensor, flexible technology, used in instruments, measuring forces, measuring devices, etc., to achieve the effects of high sensitivity, good device stability, and large range

Pending Publication Date: 2019-08-02
SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

But often the range of the sensor has a certain negative correlation with the sensitivity.

Method used

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  • Flexible pressure sensor and making method thereof
  • Flexible pressure sensor and making method thereof
  • Flexible pressure sensor and making method thereof

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Embodiment Construction

[0032] Embodiments of the present invention will be described in detail below. It should be emphasized that the following description is only exemplary and not intended to limit the scope of the invention and its application.

[0033] refer to Figure 1 to Figure 2 , in one embodiment, a flexible pressure sensor, comprising a porous material layer 3, a pair of electrode layers 2 arranged on both sides of the porous material layer 3 and a polymer substrate 1 arranged outside each electrode layer 2 , the porous material layer 3 includes a polymer material with a porous structure, a conductive polymer with piezoresistive properties adsorbed on the inner wall of the pores of the porous structure, and filled in the pores of the porous structure for expanding the Filling material for pressure sensor range. The polymer substrate 1 provides a flexible substrate for a flexible pressure sensor, and the electrode layer 2 is an electrode pattern formed on the surface of the flexible sub...

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Abstract

The invention provides a flexible pressure sensor and a making method thereof. The flexible pressure sensor comprises a porous material layer, a pair of electrode layers arranged at the two sides of the porous material layer, and polymer substrates arranged at the outer sides of the electrode layers respectively. The porous material layer comprises a polymer material having a porous structure, a conducting polymer adsorbed to the pore wall of the porous structure and having piezoresistive properties, and a filling material filled in pores of the porous structure and used for expanding range ofthe pressure sensor. The flexible pressure sensor can obtain a larger range under the condition of maintaining high sensitivity, and the device is high in stability. The making method can adjust therange of the sensor according to applications.

Description

technical field [0001] The invention relates to a pressure sensor, in particular to a flexible pressure sensor and a manufacturing method thereof. Background technique [0002] With the comprehensive advancement of intelligent manufacturing, artificial intelligence has become ubiquitous, and flexible devices have been vigorously developed. As an important part of flexible devices, flexible tactile recognition is an important way to interact with external environmental information. In the past few decades, more and more studies on the detection of vital signs by contact with human skin or organs are worthy of attention. Over the past four decades, various forms of thin-film electronics have become displays, the basis for much of the technological innovation in the fields of sensors and energy conversion, and flexible devices are key to the flexible electronics industry. The flexible electronics industry has a wide range of applications in many fields, such as flexible thin ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/22
CPCG01L1/22
Inventor 张旻会丹丹王晓浩董瑛
Owner SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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