High-stability length expansion die quartz temperature sensor provided with non-contact electrodes

Abstract

The invention discloses a high-stability length expansion die quartz temperature sensor provided with non-contact electrodes and relates to the field of sensors. The sensor comprises a packaging bodyand a resonance component located in the packaging body, wherein the resonance component is made of a quantity crystal; and the resonance component is of an integrated structure and comprises a base with two I-shaped beams, a supporting frame, m comb pieces and n resonance arms, wherein the m comb pieces and the n resonance arms are located in the supporting frame, m and n are both positive integers, m is greater than n, and the quantity of the metal electrodes on the m comb pieces is 2n. A new structure of the multi-resonance-arm length expansion die quartz temperature sensor which is provided with the non-contact electrodes and can prevent and suppress leakage of resonance energy of the resonance arms is disclosed, a non-contact electrode structure which is made of a high-temperature-resistant and aging-resistant four-layer composite metal thin film is groped, therefore, the maximum working temperature can reach 300 DEG C or above, thermal hysteresis is lowered, and the long-term stability of the sensor is improved.

Description

technical field [0001] The invention relates to the field of sensors, in particular to a high-stable-length expansion-mode quartz temperature sensor using non-contact electrodes. Background technique [0002] The resonant quartz temperature sensor is a novel digital sensor, which is famous for its high accuracy, high stability, ultra-high resolution and other excellent characteristics. Its working mechanism is "resonance", not "resistance" generated by thermal motion of molecules, so its ultra-low temperature characteristics are also quite good. This is as Russian scholar Maloof pointed out that "the sensitivity of quartz crystal temperature sensors is much higher than that of most existing temperature sensors, including platinum resistance temperature sensors. Widely used platinum resistance sensors have large nonlinearity, up to 0.55°C , while the nonlinearity of the quartz crystal temperature sensor does not exceed 0.07°C". Among them, the resonant quartz crystal tuning...

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Problems solved by technology

[0006] 4. There is no temperature drift (accuracy drift caused by environmental temperature changes), time drift, and temperature drift caused by analog circuits (such as A / D converters and amplifiers of platinum resistance thermometers) that are difficult to overcome by traditional sensors (such as platinum resistance thermometers) temperature drift)

[0011] 3. In a wide operating temperature range, especially when the temperature is high, the mutual diffusion of the two materials near the surface layer at the junction of the metal electrode and the piezoelectric quartz crystal will cause metal ions to appear on the surface layer of the quartz crystal, and the surface layer of the metal electrode will also Sio2 molecules can appear, so the surface layer near the junction of the two sides will be modified, which will affect the long-term stability of the resonant quartz temperature sensor

[0013] Obviously, the metal electrode set on the surface of the quartz resonant unit is a double-edged sword. It plays an extremely critical role in the resonant quartz temperature sensor, but it seriously affects its thermal hysteresis, repeatability and long-term stability. sex

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