Memristor device having paired-pulse facilitation characteristic and preparation method thereof
A memristive device and double-pulse technology, applied to memristive devices with double-pulse facilitation characteristics and their preparation, and the field of memristive devices and their preparation, can solve problems such as increased concentration levels, and achieve low cost, high conductivity and high conductivity. The effect of good stability, good conductivity and stability
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[0040] The present invention also provides a method for preparing the above-mentioned memristive device, comprising the following steps:
[0041] S1) Bottom electrode deposition: In a vacuum environment, the substrate is fixed on the target gun of the sputtering system, the bottom electrode material is selected as the sputtering source, and the bottom electrode is deposited by a magnetron sputtering device. The bottom electrode is evenly and completely covered on the substrate. bottom surface;
[0042] S2) Dielectric layer sputtering: maintain the vacuum environment in step S1, replace the dielectric layer sputtering source, and uniformly and completely sputter the dielectric layer on the upper surface of the bottom electrode;
[0043] S3) Preparation of Mxene suspension: Mix Mxene and deionized water according to the mass ratio of 1:200, stir for 5min-15min, and prepare Mxene suspension;
[0044] S4) Preparation of resistive layer: absorb the upper turbid liquid of the Mxene...
Embodiment 1
[0048] A memristive device with a structure of copper / MXene / silicon dioxide / tungsten and double-pulse facilitation characteristics, the preparation method of which comprises the following steps:
[0049] S1) In a vacuum environment, fix the silicon substrate on the target gun of the sputtering system, select tungsten as the sputtering source, and deposit a tungsten electrode with a thickness of 90 nm by magnetron sputtering. The tungsten electrode is evenly and completely covered on the silicon the upper surface of the substrate;
[0050] S2) Maintaining the vacuum environment in step S1, replacing the silicon dioxide sputtering source, uniformly and completely sputtering a silicon dioxide dielectric layer with a thickness of 80 nm on the upper surface of the tungsten electrode;
[0051] S3) Mix Mxene and deionized water according to the mass ratio of 1:200, and stir for 10 minutes to prepare Mxene suspension;
[0052] S4) Take the upper turbid liquid of the Mxene suspension ...
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