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Two-dimensional binary blazed grating with low degree of polarization

A blazed grating and low polarization technology, applied in the field of diffractive optical elements and spectral imaging, to achieve low polarization sensitivity, high diffraction efficiency, and improve detection accuracy

Pending Publication Date: 2019-06-07
SUZHOU UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] So far, there is no report on low polarization binary blazed gratings and their design methods for imaging spectrometers

Method used

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  • Two-dimensional binary blazed grating with low degree of polarization
  • Two-dimensional binary blazed grating with low degree of polarization
  • Two-dimensional binary blazed grating with low degree of polarization

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Embodiment 1

[0033] This embodiment provides a two-dimensional binary blazed grating with a low degree of polarization, which is used to reduce the polarization sensitivity of a grating-type imaging spectrometer to improve its detection accuracy.

[0034] See attached figure 1 , 2 and 3, which are respectively the top view schematic diagram of the groove structure of the two-dimensional binary blazed grating provided in this embodiment, the side view schematic diagram and the top view schematic diagram of a certain grating unit; figure 1 Among them, y is the direction along the groove line, the x direction is orthogonal to y, the grating units 1 are arranged periodically in the two orthogonal directions of x and y, and the grating period in the x direction is T, which is d y ;Depend on figure 2 It can be seen that a grating unit provided in this embodiment includes 7 subunits, which are the first subunit 8, the second subunit 9, the third subunit 10, the fourth subunit 11, the fifth su...

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Abstract

The invention discloses a two-dimensional binary blazed grating with a low degree of polarization, which is a cylindrical sub-wavelength microstructural transmission grating with the same height and characterized in that grating units are periodically arranged in two orthogonal directions. Each grating unit includes a plurality of sub-units, and different sub-units have the same width but different dielectric duty cycles. According to the two-dimensional binary blazed grating provided by the invention, grating grooves are of an equal-height binary structure, can be prepared according to a single-step exposure method such as electron beam exposure or laser direct writing. Compared with sawtooth grooves with ideal morphology, the grating grooves is manufactured more easily; and meanwhile, the two-dimensional binary blazed grating has the diffraction characteristics of high diffraction efficiency and low polarization sensitivity, has no polarization at the reference wavelength and is applicable to a grating type imaging spectrometer with high signal-to-noise ratio and high radiation measurement accuracy requirements.

Description

technical field [0001] The invention relates to a transmission-type low-polarization two-dimensional binary blazed grating suitable for a grating-type imaging spectrometer, and belongs to the technical field of diffractive optical elements and spectral imaging. Background technique [0002] In the 1980s, with the development of earth observation applications, imaging spectroscopy technology emerged. It is an emerging field that integrates space imaging technology and spectral imaging technology, which has greatly broadened the application scope of people in the field of space remote sensing, agricultural and forestry resource detection, mineral resource and geological exploration, military detection, and biomedicine. [0003] As the core component of the grating imaging spectrometer, the performance of the diffraction grating directly affects the performance of the spectrometer system. The grating with high diffraction efficiency can effectively improve the signal-to-noise ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/18
Inventor 朱嘉诚沈为民
Owner SUZHOU UNIV
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