Nano-vacuum gap breakdown characteristic experimental device and method based on FIB-SEM two-beam system

Abstract

The invention discloses a nano-vacuum gap breakdown characteristic experimental device and method based on an FIB-SEM two-beam system. The nano-vacuum gap breakdown characteristic experimental deviceincludes the FIB-SEM two-beam system. The FIB-SEM two-beam system is composed of a focused ion beam and a scanning electron microscope, a micro-nano scale electrode system is arranged in an experimental cavity of the FIB-SEM two-beam system, the micro-nano scale electrode system includes a test electrode, a nanometer manipulator and a five-axis sample table, the nanometer manipulator and the five-axis sample table are connected to a high-voltage voltage source and a weak current measurement unit in a voltage and current test circuit correspondingly through current limiting resistance, a pulsecurrent sensor passes through a test loop and is connected with an oscilloscope, and the oscilloscope and the voltage and current test circuit are connected with a computer to record test data. According to the nano-vacuum gap breakdown characteristic experimental device and method based on the FIB-SEM two-beam system, in-situ processing of a micro-nano-scale metal electrode, real-time regulationof vacuum gaps from 20 nm to 1 [mu]m, and corresponding functions of high-voltage testing and weak current measurement can be realized, and great significance for studying intrinsic rules of dischargebreakdown in the nano-scale vacuum gaps are achieved.

Description

technical field [0001] The invention relates to an experimental research system for studying the electrical characteristics and breakdown mechanism of nanoscale vacuum gaps, in particular to the electrical properties of nanoscale vacuum gap breakdown based on FIB (focused ion beam)-SEM (scanning electron microscope) dual-beam system Characteristic testing device and method. Background technique [0002] The study of electrical breakdown and insulation characteristics in nanoscale vacuum is a frontier topic in the field of high voltage and insulation technology. In recent years, with the further development of micro-nano processing technology, micro-nano-scale electrical components and electronic devices have emerged and been widely used in military and civilian fields. However, this type of micro-nano devices (such as NEMS, field emission display FED) often need to face a working environment with extremely high field strength, and its insulation reliability has received mor...

AI Technical Summary

Problems solved by technology

For micron and above scales, real-time observation and precise adjustment can be realized with the help of optical microscopes and mechanical displacement platforms; for nanoscales, optical microscopes can no longer meet the resolution requirements, and can only be carried out under electron microscopes

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