Penning ion source based on hollow cathode discharge

Abstract

The invention discloses a Penning ion source based on hollow cathode discharge. The Penning ion source comprises an anode cylinder, a cathode screen, a magnetic pole, an insulating sleeve, a cathode seat, an air inlet hole, a hollow cathode plate, an acceleration pole and a ceramic sleeve. The Penning ion source mainly employs multiple holes on the hollow cathode plate to perform electron collection in the glow discharge process to generate a hollow cathode effect to form Penning discharge with the anode cylinder and the cathode screen, the electrons can achieve reciprocatory motion under theeffects of the electric field and the magnetic field, the moving distances of the electrons are greatly prolonged, more electrons are generated through collision, a large beam of particle flows are output into a vacuum chamber caused by the acceleration of an acceleration pole, wherein the cathode seat and the anode cylinder are internally provided with water-cooling chambers to effectively generate heat in the discharge process, and the ceramic sleeve with a lot of micro-hole can achieve stabilization of the air intake airflow. The Penning discharge is combined with the hollow cathode discharge to achieve uniform and stable discharge and a better cooling effect so as to improve the long-term and efficient stability of the ion source.

Description

technical field [0001] The invention relates to a Penning ion source, in particular to a Penning ion source based on hollow cathode discharge. Background technique [0002] The ion source is the most widely used ion-assisted deposition at this stage, and a device that discharges ionized gas through plasma during the vapor deposition process of cleaning the product to be plated. The ion source can effectively improve the density and adhesion of the film layer, as well as the optical and mechanical properties of the film layer. The commonly used ion sources at this stage mainly include Penning ion source, Hall ion source, and anode layer ion source. [0003] The Penning ion source is an ion source designed on the basis of Penning discharge. By applying a magnetic field in the axial direction of the annular anode, the electrons move back and forth between the two cathodes to increase the ionization rate of gas particles. The Penning ion source The principle causes the structu...

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Problems solved by technology

However, the gap between the anode and the cathode of the ion source on the anode layer is small, and the coating device is easily polluted, which affects the insulation of the ion source. At the same time, there is ablation corrosion on the cathode, which is easy to pollute the coating.

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