Extreme ultraviolet light generating system with high efficiency and continuously adjustable wavelength based on ultrashort pulse laser

Abstract

The invention discloses an extreme ultraviolet light generating system with high efficiency and continuously adjustable wavelength based on an ultrashort pulse laser. The fundamental frequency light outputted by the ultrashort pulse laser passes through an optical frequency multiplier or an optical parametric amplifier for wavelength conversion, converted pulsed laser is focused on inert gas by ahigher harmonic generator to radiate and generate higher harmonics, the wavelength is selected by an extreme ultraviolet monochromator, and finally monochromatic extreme ultraviolet light with high energy and high luminous flux is outputted. The extreme ultraviolet light generating system has the advantages of high stability, good signal-to-noise ratio, the wavelength conversion of an ultrashort pulse fundamental frequency light is carried out by using the optical frequency multiplier or the optical parametric amplifier, the higher harmonics of specific photon energy is selected from a higherharmonic spectrum by using a spectroscopic grating, a mirror and a multi-dimensional adjustment structure, the high efficiency and continuously adjustable wavelength are achieved, the generated high energy and extreme ultraviolet light can be used for the research of a time-resolved and angular-resolved photoelectron spectroscopy system and an extreme ultraviolet coherent diffraction imaging system.

Description

technical field [0001] The invention relates to a high-efficiency and continuously adjustable extreme ultraviolet light generation system based on ultrashort pulse laser, and belongs to the technical fields of time-resolved and angle-resolved photoelectron spectroscopy systems and extreme ultraviolet light coherent diffraction imaging systems. Background technique [0002] The time-resolved and angle-resolved photoelectron spectroscopy system (TR-ARPES) uses the photoelectric effect to study the electronic band structure inside solid materials. The system uses femtosecond-level extreme ultraviolet pulsed light to detect the sample, and can obtain the change law of the electronic energy band of the sample within the femtosecond-level time scale, which is useful for studying the internal electronic dynamic information and research of new electronic materials. Ultra-high-speed devices provide an efficient approach. In time-resolved and angle-resolved photoelectron spectroscopy...

AI Technical Summary

Problems solved by technology

However, in these systems, high-order harmonics are usually directly excited by ultrashort-pulse fundamental-frequency lasers, and there are problems such as low luminous flux, low conversion efficiency, and difficulty in breaking through 100eV photon energy (ultraviolet light has a longer wavelength), and the incident light wavelength Unable to continuously adjust and other limitations

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