(D)KDP crystal body damage performance high-precision measurement device and measurement method
A technology of measuring device and measuring method, which is applied in the direction of measuring device, material analysis by optical means, instrument, etc., can solve the problems of inability to obtain the three-dimensional distribution of crystal damage points, mutual occlusion of damage points, and high measurement uncertainty. Easy to debug, prevent deliquescence, and characterize comprehensive effects
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Embodiment 1
[0053] Such as figure 1 As shown, this embodiment provides a high-precision measuring device for DKDP crystal body damage performance, including a laser 1, a first mirror 3, a second mirror 2, an energy meter 4, a polarizer 5, a 1 / 2 wave plate 6, Focusing lens 7, optical wedge 8, CCD camera 15, photocell 16, oscilloscope 17, three-dimensional translation stage 10, ring light source 9, broadband polarizer 13, microscope 14, absorption trap 12 and PC computer 18, also includes two-dimensional translation stage 11 and two translation stage drive controllers (not shown) that are respectively connected with the two-dimensional translation stage 11 and the three-dimensional translation stage 10, the field of view of the microscope 14 can be spliced and is larger than the spot size on the crystal sample to be measured, The lateral resolution of the microscope 14 is less than 1 μm, the working distance of the microscope 14 is greater than the thickness of the crystal sample to be me...
Embodiment 2
[0073] This embodiment is further optimized on the basis of Embodiment 1, specifically:
[0074] In S4, the two-dimensional translation stage 11 and the three-dimensional translation stage 10 are controlled by the PC computer 18, so that the microscope 14 performs three-dimensional tomographic photography of the area to be tested, specifically:
[0075] S4.1: Record the three-dimensional coordinates of the shooting starting point, and control the drive controller of the translation platform through the PC computer 18, thereby controlling the movement of the two-dimensional translation platform 11, so that the microscope 14 laterally photographs a certain tomographic surface of the area to be measured;
[0076] S4.2: After the horizontal shooting of the tomographic surface is completed, the three-dimensional translation stage 10 is controlled by the PC computer 18, so that the three-dimensional translation stage 10 is stepped along the longitudinal direction of the crystal sampl...
Embodiment 3
[0080] This embodiment is further optimized on the basis of Embodiment 1, specifically:
[0081] Described S6 specifically comprises the following steps:
[0082] S6.1: Use 3D image processing software, such as Avizo, Amira, etc., to subtract the picture before damage measurement from the picture after damage measurement to obtain the damage map after pulse action;
[0083] S6.2: Eliminate the impact of the surface factors of the crystal sample to be tested on the pulse effect, solve the problems of repeated statistics of damage points, background light elimination, binarization, etc., and use the image moment algorithm to find the centroid of each scattering point;
[0084]S6.3: Perform three-dimensional reconstruction on all tomographic images of the damage map after excluding the influence, and obtain the three-dimensional distribution of damage points in the crystal body;
[0085] S6.4: Analyze the image obtained after three-dimensional reconstruction to obtain the number...
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