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Superconducting film, preparation method thereof, superconducting quantum interference device and inductive superconducting edge detector

A superconducting thin film and superconducting technology are applied in the fields of superconducting quantum interference devices, superconducting thin films and their preparation, and inductive superconducting edge detectors.

Active Publication Date: 2019-01-29
NAT INST OF METROLOGY CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Traditionally, for pure niobium superconducting films, the superconducting transition temperature can be changed by adjusting the film thickness, but the superconducting transition temperature of pure niobium films is very sensitive to the thickness, and the process repeatability is not easy to control

Method used

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  • Superconducting film, preparation method thereof, superconducting quantum interference device and inductive superconducting edge detector
  • Superconducting film, preparation method thereof, superconducting quantum interference device and inductive superconducting edge detector
  • Superconducting film, preparation method thereof, superconducting quantum interference device and inductive superconducting edge detector

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Embodiment Construction

[0034] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0035] An embodiment of the present invention provides a superconducting thin film, the composition of the superconducting thin film includes niobium and silicon, the proportion of niobium in the superconducting thin film is greater than or equal to 81.5% and less than or equal to 97.1%, the superconducting thin film The superconducting transition temperature is between 3.85K and 7.1K.

[0036] In the past, the superconducting transition temperature of superconducting thin films can also be adjusted by adjusting the thickness of pure niobium thin films. In fact, when the thickness of pure niobium ...

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Abstract

The invention relates to a superconducting film. The components of the superconducting film includes niobium and silicon, wherein the proportion of niobium in the superconducting film is greater thanor equal to 81.5% and less than or equal to 97.1%, and the superconducting transition temperature of the superconducting film ranges from 3.85K to 7.1K. The superconducting film provided by the invention can realize the change of the superconducting transition temperature only by controlling the proportion of niobium, thereby being simple in implementation process, and being easy to process and prepare.

Description

technical field [0001] The invention relates to the field of superconducting devices, in particular to a superconducting thin film and a preparation method thereof, a superconducting quantum interference device and an inductive superconducting edge detector. Background technique [0002] The measurement of fundamental physical quantities of individual particles requires extremely sensitive sensors. Superconducting transition edge sensors (TES for short) is such a sensor, it is composed of superconducting thin film, the working temperature is between its superconducting state and the narrow range of normal state, that is, superconducting resistance Between zero and the normal value. After Andrews proposed in 1949, TES has made great progress. Compared with semiconductor single-photon detectors at room temperature, such as avalanche diodes or photomultiplier tubes, TES has the advantages of fast response speed and low detection energy. At present, the TES imaging array reac...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L39/02H01L39/12H01L39/24C23C14/14C23C14/35H10N60/80H10N60/01H10N60/85
CPCC23C14/14C23C14/352H10N60/80H10N60/805H10N60/85H10N60/01H10N60/0912Y02E40/60
Inventor 钟青王雪深李劲劲曹文会钟源王兰若
Owner NAT INST OF METROLOGY CHINA
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