Vertical PECVD compound PVD vacuum coating system
A vacuum coating, vertical technology, applied in the direction of vacuum evaporation coating, overlay coating, sputter coating, etc., can solve the problems of poor film uniformity and low ionization rate, and achieve low production cost and prevent ionization Pollution, the effect of ensuring film quality
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[0022] The present invention is a vertical PECVD composite PVD vacuum coating system, the structure is as follows Figure 1~Figure 3 As shown, it includes a feed chamber 1, a preheating chamber 2, a coating chamber 3, a buffer chamber 4, and a discharge chamber 5 that are closely connected in sequence. The feed chamber 1 and the discharge chamber 5 are in the atmosphere, and the preheating chamber 2, Both the coating chamber 3 and the buffer chamber 4 are connected with a vacuum pumping system 11, and the top of the coating chamber 3 is welded with a rail 6, and a substrate frame 7 is nested in the rail 6, and a substrate 9 is hung on the substrate frame 7 through a hook 8. The bottom of the substrate 9 is located on the conveyor belt 10, and the conveyor belt 10 is connected to the bottom of the coating chamber 3 through driving rollers.
[0023] The coating chamber 3 is provided with a PVD magnetron sputtering device, a gas release device and a PECVD device, the PVD magnetro...
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