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Terahertz spectrum calibration system and terahertz spectrum calibration method

A technology of calibration system and calibration method, which is applied in the field of terahertz, can solve problems such as narrow reliable range, error environment interference, and unsuitable storage of materials, so as to achieve the effect of improving accuracy and reliability and reducing spectrum error

Active Publication Date: 2018-12-18
BEIJING INST OF ENVIRONMENTAL FEATURES
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The technical problem to be solved by the present invention is to solve the problem that the error is easily disturbed by the environment, the reliable range is narrow, or the substance used as the measurement standard is not suitable for storage, and the resolution of the spectral line cannot be adjusted during the current terahertz spectrum calibration.

Method used

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  • Terahertz spectrum calibration system and terahertz spectrum calibration method

Examples

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Embodiment 1

[0046] Such as figure 1 As shown, a terahertz spectrum calibration system provided by an embodiment of the present invention includes: a laser light source (not shown in the figure), a terahertz wave generating unit 1, a detection unit 2, a terahertz optical path, a collimating optical path, and a transmission-reflection slice, spectroscopic element and standard measuring tool S2, specifically:

[0047] The laser light source is used to generate homologous pump beams and probe beams, and the terahertz wave generation unit 1 is used to receive the pump beams to generate homologous terahertz waves. The terahertz optical path is used to transmit the terahertz wave, so that the terahertz wave enters the transmissive reflective sheet at an angle of 45°, and after being reflected at the incident transmissive reflective sheet, enters the detection unit 2 and focuses in the detection unit 2.

[0048] The standard measuring tool S2 is a solid flat plate, which is set at the focusing m...

Embodiment 2

[0078] Embodiment 2 is basically the same as Embodiment 1, and the similarities will not be described in detail. The difference lies in:

[0079] The terahertz spectrum calibration system provided in this example uses a standard measuring tool with a thickness of 500 μm and a high-resistance silicon wafer (refractive index 3.418), and compares it with an unoptimized system that does not use collimated light for calibration. The refractive index of the high-resistance silicon wafer is known, and its dispersion is not obvious in the terahertz frequency band, so the peak / valley frequency of the standard gauge oscillation satisfies the formula (1) in Embodiment 1, and its transmission spectrum satisfies the formula (2) .

[0080] Figure 3a It shows the standard gauge oscillation of a 400μm high-resistance silicon wafer (refractive index 3.418) in an unoptimized (no collimated optical path) system. It can be seen that there is a big difference between the actual value (solid line...

Embodiment 3

[0084] The third embodiment provides a terahertz spectrum calibration method, which is operated by using the terahertz spectrum calibration system in any one of the above-mentioned embodiments, and specifically includes the following steps:

[0085] S1. Adjust the terahertz optical path and the optical path of the detection beam, so that the terahertz wave and the detection light are focused and enter the detection unit 2 .

[0086] After the laser light source is turned on, the laser light source generates homologous pump beams and probe beams. The pump beam is input to the terahertz wave generation unit 1, and the terahertz wave generation unit 1 generates the homologous terahertz wave. After the homologous terahertz wave passes through the terahertz optical path, it enters the transmissive reflective sheet at an angle of 45°, and passes through the transmissive reflective sheet. After reflection, input to detection unit 2. The detection beam is divided into two paths, one ...

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Abstract

The invention relates to a terahertz spectrum calibration system, comprising a laser light source, a terahertz wave generating unit, a detecting unit, terahertz optical paths, a collimating optical path, a transmission reflector, a light splitting element and a standard measuring tool. The system performs frequency calibration on a terahertz time domain spectrum by utilizing periodic oscillation of the standard measuring tool formed by multiple reflections in the standard measuring tool through a terahertz wave, and the system realizes indirect calibration between terahertz wave optical pathsusing homologous collimating lights by introducing a collimating optical path to make the terahertz wave be perpendicular to the standard measuring tool, thereby reducing spectral errors caused by non-normal incidence, and effectively improving the accuracy and reliability of the system. The invention also provides a terahertz spectrum calibration method, which performs spectrum calibration by theterahertz spectrum calibration system, and uses the collimating light reversely input into the terahertz optical paths to adjust the terahertz optical paths, so that the standard measuring tool is perpendicular to the terahertz wave, and the spectral errors caused by the standard measuring tool on terahertz tilt angles are reduced.

Description

technical field [0001] The present invention relates to the field of terahertz technology, in particular to a terahertz spectrum calibration system and method. Background technique [0002] Terahertz waves generally refer to electromagnetic waves with wavelengths from 30 micrometers to 3 millimeters and frequencies from 0.1 to 10 terahertz. Terahertz waves are between infrared and millimeter waves, and have a fairly wide spectrum. Because terahertz waves are in the transition region between photonics and electronics, it can provide information that traditional detection methods such as visible light or microwaves cannot provide, so it has great application prospects in the fields of physics, chemistry and biomedicine. [0003] In the field of terahertz wave research, terahertz time-domain spectroscopy is a very important and widely used technology. The principle of this technology is to first mix the terahertz pulse and the sampling detection pulse in the detector, and the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/3586
CPCG01N21/3586
Inventor 张景蔡禾李粮生孙金海殷红成肖志河
Owner BEIJING INST OF ENVIRONMENTAL FEATURES
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