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Process method for prolonging service life of upper electrode of etching machine table

A process method and etching machine technology, applied in metal material coating process, anodic oxidation, electrolytic coating, etc., can solve the problems that affect the production capacity of the equipment, the yield rate of the glass substrate, the particles at the pores, and the inability to meet the use requirements, etc., to achieve excellent Plasma etching gas corrosion resistance, excellent plasma etching gas corrosion resistance, and high compactness

Active Publication Date: 2018-12-11
芜湖通潮精密机械股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

With the development of the liquid crystal panel industry, higher requirements are placed on the life time of the etching chamber. In addition, the plasma etching atmosphere in the high-generation (G8.5, G10.5) etching chamber is even harsher. The etching power is also getting higher and higher, and the gas holes of the upper electrode are severely etched, resulting in particles and abnormal discharges at the gas holes, seriously affecting equipment productivity and glass substrate yield.
The existing anodic oxidation process can no longer meet the requirements of use, it is necessary to provide effective solutions to the above problems

Method used

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  • Process method for prolonging service life of upper electrode of etching machine table
  • Process method for prolonging service life of upper electrode of etching machine table
  • Process method for prolonging service life of upper electrode of etching machine table

Examples

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Embodiment 1

[0043] A process for improving the service life of electrodes on an etching machine, comprising the following steps

[0044] (1) The upper electrode is an aluminum component, which is degreased and polished first;

[0045] (2) Masking before sandblasting: use figure 2 The structure shown is set to be protected before sandblasting, and only 5-12mm around the air hole is roughened by sandblasting. figure 2 The thickness of the sandblasting protection fixture is 3mm, the material is Al or SUS, and the aperture of the fixture is 6mm. Use heat-resistant double-sided tape to adhere the fixture and upper electrode;

[0046] (3) Sandblasting: use white corundum sand material, mesh number 60#, sandblasting pressure 0.3Mpa, sandblasting distance 300mm, after sandblasting, the roughness around the pores reaches Ra 3.5μm;

[0047] (4) Cleaning and drying: Remove the masking on the surface of the upper electrode, first use a dust-free cloth dipped in acetone to remove the residual glu...

Embodiment 2

[0056] A process for improving the service life of electrodes on an etching machine, comprising the following steps

[0057] (1) The upper electrode is an aluminum component, which is degreased and polished first;

[0058] (2) Masking before sandblasting: use figure 2 The structure shown is set to be protected before sandblasting, and only 12mm around the air hole is roughened by sandblasting. figure 2 The thickness of the protective tool for medium sandblasting is 5mm, the material is Al or SUS, and the hole diameter of the tool is 10mm. In order to prevent the jig from sliding against the surface of the upper electrode under the action of sand or compressed air during the sandblasting process, resulting in wrong sandblasting range and scratches on the surface of the upper electrode, use figure 2 The shown double-sided tape is attached to the jig and top electrode;

[0059] (3) Sandblasting: use white corundum sand material, mesh number 100#, sandblasting pressure 0.5Mp...

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Abstract

The invention discloses a process method for prolonging the service life of an upper electrode of an etching machine table. The process method comprises the following steps of 1, shielding a sand blasting space around air holes of the upper electrode; then, performing sand blasting roughening treatment; 2, removing shelters and sand material impurities; 3, performing anodization on the upper electrode surface to form an anodization membrane; 4, shielding a spray coating space around the air holes of the upper electrode; then, spraying and coating a ceramic coating; 5, removing shelter impurities; then, performing drying treatment. The service life of the upper electrode can be effectively prolonged; the corrosion resistant performance is excellent.

Description

technical field [0001] The invention belongs to the technical field of anti-etching of electrodes, and in particular relates to a process method for improving the service life of electrodes on an etching machine. Background technique [0002] The dry engraving machine is the key equipment in the process of preparing liquid crystal panels. The upper electrode is the key component in the dry engraving machine. The surface of the upper electrode is evenly covered with pores (0.5-1mm), see figure 1 shown. When the etching machine is working, the plasma etching gas enters the etching chamber through the pores, and the pores on the surface of the upper electrode realize the uniform distribution and adjustment of the plasma etching gas. A voltage is applied between the upper electrode and the lower electrode, and a high voltage is formed between the upper and lower electrodes. Electric field, the plasma etching gas bombards the stripped substrate under the action of a high voltage...

Claims

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Application Information

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IPC IPC(8): C25D11/04C25D11/16C23C4/134C23C4/10
CPCC23C4/10C25D11/04C25D11/16C23C4/134
Inventor 何新玉司奇峰王慧赵浩
Owner 芜湖通潮精密机械股份有限公司
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