High-frequency switch power supply system high-voltage flashover short circuit protection system and protection method for electronic gun

Abstract

The invention discloses a high-frequency switch power supply system high-voltage flashover short circuit protection system for an electronic gun. The high-frequency switch power supply system high-voltage flashover short circuit protection system comprises a flashover current detection circuit, an output current detection circuit and a flashover protection control circuit, wherein the flashover current detection circuit comprises a first current transformer arranged in a high-voltage filter capacitor branch circuit of a high-frequency switch power supply system for the electronic gun, and resistor connected with the first current transformer in parallel; the output current detection circuit comprises a second current transformer arranged on a high-voltage output ground end branch circuit and a resistor connected with the second current transformer in parallel; and the flashover protection control circuit is used for receiving the output of the output current detection circuit and the flashover current detection current, and is controllably connected with the high-frequency switch power supply system for the electronic gun. When the high-voltage power supply suffers from flashover sparking, a punching current transformer is adopted for isolating and sampling, and rapid sealing and breaking of an inverter is realized, so that the system achieves the characteristics of high anti-interference capability, high reliability, fast response and fast recovery, and is especially suitable for the high-voltage power supply in the electronic gun system.

Description

technical field [0001] The invention belongs to the technical field of high-voltage power supplies, and in particular relates to a high-voltage flashover short-circuit protection system and a protection method for a high-frequency switching power supply system for an electron gun. Background technique [0002] Electron guns are widely used in vacuum coating, smelting, 3D printing, welding and other industrial and scientific research fields. Electron guns need a high-voltage power supply to provide tens of kilovolts or even hundreds of kilovolts of UHV to accelerate the electron beam. The output power of the power supply is around 6kW-500kW. Generally, under normal working conditions of the electron gun, flashover and ignition often occur, mainly due to the release of gas from random components, which causes arcing between the negative high voltage cathode and the anode (ground terminal) in the electron gun, sometimes up to 1 minute under severe working conditions Fire hundre...

AI Technical Summary

Problems solved by technology

[0004] In addition, in the general high-voltage power supply flashover processing control circuit, after the comparator collects the flashover signal, it only performs fixed delay processing, that is, the restart period of the flashover protection is a fixed period, and the restart period is at most a configurable mode , and in order to ensure the arc extinguishing time, the cycle interval is generally set relatively large

Therefore, flashover arc extinguishing does not have adaptive ability, which affects the efficiency of electron beam work, and cannot meet the requirements for continuity of electron gun power supply - fast protection, fast arc extinguishing, self-adaptive fast restart

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