Multi-band highly reflective flexible wave plate and preparation method thereof
A high-reflection, multi-band technology, applied in the direction of instruments, polarizing elements, optics, etc., can solve the problems of complex process, low reflectivity, non-bendable nature, etc., and achieve good application prospects and simple production effects
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[0029] see figure 1 , the embodiment of the multi-band highly reflective flexible wave plate of the present invention includes a substrate with a nano-metal nickel grating, and a first silver metal layer, a silicon dioxide resonant cavity layer and a second silver metal layer are sequentially arranged on the upper layer of the substrate. The resonant cavity medium layer and the second metal layer are discontinuously distributed in the grating groove and grid ridge position of the base nickel grating, the period P of the nano-metal nickel grating is 250nm, and the duty ratio W / P is 0.5, the thickness H1 is 140nm; the thickness H2 of the first metal layer is 160nm, the thickness H3 of the resonant cavity medium layer is 50nm, and the thickness H4 of the second metal layer is 50nm.
[0030] see figure 2 , the material of the dielectric grating in this embodiment is SiO 2 , the material of the metal layer is Ag. is the phase difference of the polarization components in Ex and...
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