Semiconductor structure and forming method thereof
A technology of semiconductor and gate structure, applied in the field of semiconductor structure and its formation, can solve problems such as the need to improve electrical performance, and achieve the effect of good electrical connection performance
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[0032] It can be seen from the background art that the electrical performance of the semiconductor structure with conductive plugs formed in the prior art needs to be improved.
[0033] Now combine with a method of forming a semiconductor structure for analysis, refer to figure 1 and figure 2 ,in, figure 1 is a schematic diagram of a cross-sectional structure of a semiconductor structure along a direction parallel to the extension of the fin, figure 2 It is a schematic cross-sectional structure diagram of a semiconductor structure along the direction perpendicular to the extending direction of the fin.
[0034] refer to figure 1 and figure 2 , providing a substrate, the substrate has a gate structure 104, the substrate on both sides of the gate structure has source and drain doped regions 105, and the dielectric on the substrate exposed by the gate structure and on the top of the gate structure layer; through the first through hole 108 of the dielectric layer above the...
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