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Flexible wearable air pressure sensor, preparation method and application thereof

An air pressure sensor, flexible technology, applied in the direction of fluid pressure measurement by changing the ohmic resistance, can solve problems such as inability to bend and deform, fixed structure of the barometer, and inability to apply application requirements, etc., to achieve low cost, simple structure, and convenient processing Effect

Active Publication Date: 2018-10-16
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Traditional air pressure sensing devices mainly include mercury barometers and aneroid barometers. These barometers are made according to the experimental principles of Evangelista Torricelli (1608~1647), and generally have a glass Or a rigid base made of other solid materials, so this type of barometer has a fixed structure and cannot be bent and deformed, so it cannot be applied to some special application requirements, such as not suitable for embedding in wearable devices

Method used

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  • Flexible wearable air pressure sensor, preparation method and application thereof
  • Flexible wearable air pressure sensor, preparation method and application thereof
  • Flexible wearable air pressure sensor, preparation method and application thereof

Examples

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preparation example Construction

[0069] In some preferred embodiments, the preparation method comprises:

[0070] Prepare flexible top layer and flexible bottom layer respectively;

[0071] Coating an annular sealing material on the surface of the flexible bottom layer, and then covering the flexible top layer on the annular sealing material;

[0072] Warm up to the melting temperature of the annular sealing material under vacuum conditions, and keep for a set time, then turn off the heat source, keep the vacuum, and cool naturally, so that the flexible top layer and the flexible bottom layer are bonded under vacuum conditions, so as to be on the second surface. At least a partial area and at least a partial area of ​​the third surface form a sealed air chamber, so that the flexible and wearable air pressure sensor is obtained.

[0073] Different annular sealing materials have different melting temperatures, but when selecting a sealant, it is not easy to choose a material with a melting temperature greater ...

Embodiment 1

[0115] Mix the PDMS base solution and CNTs (multi-walled carbon nanotubes) at a mass ratio of 100:2, and then prepare a mixed solution with chloroform at a volume ratio of 1:4, and then stir for 12 hours to ensure that the CNTs are evenly mixed In PDMS, the chloroform is completely volatilized by heating, and then the remaining mixture is spin-coated on a silicon wafer with a microstructure to prepare a flexible top layer with a microstructure, such as figure 1 shown. Afterwards, the PET film of a thin layer of ITO is selected to be spin-coated as a flexible bottom layer, and a high-purity paraffin wax with a suitable shape is coated on this layer, such as figure 2 shown. After that, under normal pressure (101KPa), the high-purity paraffin is melted by heating, then the heat source is turned off, the vacuum is kept, and the natural cooling makes the flexible top layer and the flexible bottom layer stick naturally, such as image 3 As shown, finally a flexible wearable air p...

Embodiment 2

[0118] Mix the PDMS base solution and CNTs (multi-walled carbon nanotubes) at a mass ratio of 100:2, and then prepare a mixed solution with chloroform at a volume ratio of 1:4, and then stir for 12 hours to ensure that the CNTs are evenly mixed In PDMS, the chloroform is completely volatilized by heating, and then the remaining mixture is spin-coated on a silicon wafer with a microstructure to prepare a flexible top layer with a microstructure, such as figure 1 shown. Afterwards, the PET film of a thin layer of ITO is selected to be spin-coated as a flexible bottom layer, and a high-purity paraffin wax with a suitable shape is coated on this layer, such as figure 2 shown. Then, under the condition of vacuum degree of 100Pa, the high-purity paraffin wax is melted by heating, then the heat source is turned off, the vacuum is maintained, and natural cooling is made, so that the flexible top layer and the flexible bottom layer are naturally pasted, such as image 3 As shown, fi...

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Abstract

The invention discloses a flexible wearable air pressure sensor and a preparation method and application thereof. The flexible wearable air pressure sensor comprises a flexible top layer provided witha first surface and a second surface opposite to the first surface, wherein the second surface is provided with a microstructure, which can make a sensitive distinguishable response according to thechange of the borne pressure and is electrically connected with a power supply; a flexible bottom layer which is provided with a third surface, wherein the at least the third surface is conductive andis in electrical contact with the microstructure; and a sealing gas chamber formed between the flexible top layer and the flexible bottom layer, wherein at least partial chamber wall of the sealing gas chamber is formed by at least partial area of the second surface and at least partial area of the third surface, and the air pressure in the sealing air chamber reaches the set vacuum degree. The flexible wearable air pressure sensor has the flexible wearable characteristics, and the testable air pressure ranges from 20 kPa to 101 kPa. The preparation process is simple, and the cost is low.

Description

technical field [0001] The invention relates to a pressure sensor, in particular to a flexible wearable air pressure sensor and its preparation method and application, belonging to the technical field of microelectronic devices. Background technique [0002] With the rapid development of the field of intelligence, flexible wearable devices have attracted a lot of attention. People are committed to preparing flexible wearable devices that sense various external signals, such as flexible pressure sensors, flexible temperature sensors, and flexible stress sensors. Research on such flexible wearable devices focuses on the synthesis or selection of suitable flexible materials, and the design of special device structures or material microstructures to achieve special functions. At the same time, on the basis of existing research, people have made a lot of promotional effects on the specific application of existing research results. [0003] But in general, there is still a lot o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/06
CPCG01L9/06
Inventor 李立强孟彦成李红卫王曙光
Owner SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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