Personnel access control system and method for copper wiring area

Abstract

The invention teaches a personnel access control system and method for a copper wiring area. The method comprises the following steps of enabling pre-access personnel to enter a verification area, enabling a human body detection device to give out a triggering signal, performing pattern information acquisition on the pre-access personnel based on the triggering signal, judging whether the clothingof the pre-access personnel meets the specification or not according to pattern information, displaying the clothing judgment result to the pre-access personnel and opening or not opening an automatic door according to the judgment result. Compared with the prior art, the system and method can be used for solving the problem that when the personnel get in or out of the copper wiring area, only self-supervision is depended on and effective means do not exist to determine whether the clothing of the pre-access personnel meets the specification or not, copper pollution risk is effectively reduced, in addition, the verification of identity can be introduced as well, dual judgment on the qualification of personnel that get in and out of the copper wiring area is realized, management and control are better realized, meanwhile, the pattern information and identity information of the pre-access personnel of whom the clothing does not meet the specification or the verification of the identityis not passed can be recorded and stored as well, and the supervision and management are convenient.

Description

technical field [0001] The invention relates to a management of a manufacturing workshop, in particular to a system and method for controlling the entry and exit of personnel in a copper process area. Background technique [0002] As individual devices get smaller, integrated circuits run at higher and higher speeds. At speeds of a few hundred megahertz, signals must move through the metal system fast enough to prevent procedural delays. In order to improve the delay of the metal wiring, a metal with a lower resistance value can be used as the metal wiring or the parasitic capacitance of the dielectric layer between the metal wiring can be reduced. The copper process is a feasible solution to the delay effect. The conductivity of copper is better than that of aluminum. At the same time, copper itself has the ability to resist electromigration and can be deposited at low temperature. [0003] However, because copper atoms are easy to diffuse at high temperature, it is easy ...

AI Technical Summary

Problems solved by technology

[0005] However, because the existing control method is relatively loose, it is controlled by the self-monitoring of the personnel entering and leaving, and there is no effective means to determine whether the personnel wearing the clothing conforms to the regulations, so it often occurs because the personnel entering and exiting forget to change gloves and foot covers. copper pollution accident

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