Micro-machining tool rest with force servo function

Abstract

The invention discloses a micro-machining tool rest with a force servo function. The micro-machining tool rest comprises a PZT actuator, a first displacement sensor, a second displacement sensor, a screw rod, a nut, a rotating ring, a flexible hinge, a probe, a guide bracket and an XY displacement platform. In the micro-machining tool rest, the flexible hinge is utilized to change the normal forcemeasurement to the normal deformation amount measurement of the flexible hinge, and the measurement of the displacement is simpler and more accurate; the ring-shaped central-symmetric flexible hingecan effectively resist the deformation generated by the lateral force, so that the probe and the XY plane are kept perpendicular as far as possible, and the deflection angle is reduced; the angle of the probe can be adjusted by using the rotating ring in cooperation with a set screw, and the micro-machining at different angles can be realized; the maximum load can be changed by replacing the flexible hinge so as to be suitable for machining workpieces different in hardness; the distance between the second displacement sensor and the flexible hinge can be adjusted through the screw nut, so thatthe initial distance can be conveniently determined, and the measurement is facilitated.

Description

technical field [0001] The invention relates to a tool holder for micromachining, in particular to a tool holder for micromachining with force servo function. Background technique [0002] With the development of nanotechnology, especially the invention of Atomic Force Microscope (AFM), people found that mechanical processing methods still have inestimable potential in the processing of nanostructures. Nanomachining is an extension of traditional machining. In this method, micro-nano-sized probes replace traditional mechanical cutting tools, and use the interaction force between the needle tip and the sample to scrape, indent, and pull on the surface of the sample. Or pushing materials to produce micro-nano structures. The nanomachining method using the force servo control processing method has outstanding advantages: it can achieve more accurate "tool setting"; the workpiece does not need to be strictly leveled; it has a "following" effect on the surface of the workpiece, ...

AI Technical Summary

Problems solved by technology

However, as a system for measuring and evaluating surfaces at the atomic level, AFM has a very small force applied to the surface of the workpiece through the needle tip, which limits the processing capacity and workpiece material, and has low processing efficiency, small range, and high instrument cost. It is still far from meeting the processing needs of the current micro-nano structure

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