Chromatic dispersion collimator objective

Abstract

The present invention discloses a chromatic dispersion collimator objective. The chromatic dispersion collimator objective comprises a plurality of single lenses, light with different wavelengths is incident at different divergence angles after luminous points of a continuous spectroscopic light source pass through the chromatic dispersion collimator objective, the positions of the luminous points, if the divergence angle of one wavelength beam in a designed wavelength range is close to zero, the divergence angles of beams smaller than the wavelengths are negative values, and the divergence angles of beams larger than the wavelengths are positive values. The chromatic dispersion collimator objective can perform free combination with imaging lenses or microobjectives or laser machine focusing objective lenses in the prior art to achieve an independent objective lens system with a spectrum confocal chromatic dispersion objective lens function to expand the measurement function of the current measurement system, and for the laser micromachine system, the problems of dimension measurement such as coaxial height tracking and depth after machining, and the intelligence and the precisionlevel of the devices and instruments can be observably improved.

Description

technical field [0001] The invention relates to an objective lens, in particular to a dispersion objective lens in which a continuous spectrum light source passes through the dispersion collimation objective lens of the present invention, and the emitted light beam is an approximately collimated light beam, which belongs to the field of optical objective lenses. The invention is mainly applied in the field of non-contact detection. Background technique [0002] As early as the 1970s, scholars such as Courtney Pratt proposed a technology that can use the chromatic aberration of the microscope objective lens to detect surface topography; later, Molesini and other scholars used a set of specially designed lenses with chromatic aberration to build a spectrum-based The surface profiler of the confocal principle; Boyde.A et al. extended it to the confocal microscope technology that brought revolutionary changes to the field of microscopy. Since then, many foreign scholars have ca...

AI Technical Summary

Problems solved by technology

For systems where the processing object is metal, capacitive sensors are usually used to track the laser focus position in real time with the processing object as a part of the capacitor. However, for non-metal processing objects (such as glass, crystal, plastic film, etc.), due to Nonmetals are not conductors, so capacitive sensors cannot work, and coaxial tracking cannot be realized. If the dispersion objective lenses disclosed in Chinese patents with publication numbers CN 104238077 A, CN 102650515 A, and application numbers CN201621253067.7 and CN201611031833X are used It can only be installed obliquely, and the processing optical path and the detection optical path cannot be coaxial

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