Planar motion platform for use in optoelectronic packaging
A motion platform, plane motion technology, applied in circuits, electrical components, transportation and packaging, etc., can solve the problems of increasing the load of linear motors, the influence of motion speed, acceleration and start-stop accuracy, and reducing the efficiency and accuracy of optoelectronic packaging. Small size, overcomes the effect of larger size
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[0025] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
[0026] According to one aspect of the present invention, a planar motion platform applied to optoelectronic packaging is provided. figure 1 It is an exploded diagram of a planar motion platform applied to optoelectronic packaging according to an embodiment of the present invention, figure 2 It is a schematic diagram of a planar motion platform applied to optoelectronic packaging according to an embodiment of the present invention. The motion platform includes: a stage 10, a first decoupling device 20, a first drive device 30, a second decoupling device 40 and a second drive device 50; the top of the first decoupling device 20 is connected to the load The bottom of the o...
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Abstract
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