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Method for fabricating MEMS friction sensor based on visual alignment

A production method and visual alignment technology, which are applied in the process of producing decorative surface effects, the manufacture of microstructure devices, and the measurement of the property force of piezoresistive materials, etc. problems such as low sensitivity, to achieve the effect of improving accuracy and improving assembly accuracy

Active Publication Date: 2018-08-31
中国空气动力研究与发展中心超高速空气动力研究所
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Problems solved by technology

In 2010, Joseph A. Schetz et al. [Direct measurement of skin friction in complex flows, 48th AIAA Aerospace Sciences Meeting Including the New Horizons Forum and Aerospace Exposition 4-7 January 2010, Orlando, Florida [C].] developed a strain-type micrometer Friction balance, the friction resistance measurement test of the model surface is carried out in the flow field of the hypersonic wind tunnel with Ma=4, but this kind of micro balance has low sensitivity, poor temperature stability, and large volume, so it cannot be used to accurately measure the surface friction of the aircraft. The distribution of resistance
However, due to the method of disassembly processing and manual assembly of the meter head structure, the accuracy of prototype processing and assembly is poor, resulting in the accuracy of wind tunnel flow field measurement cannot be evaluated

Method used

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  • Method for fabricating MEMS friction sensor based on visual alignment
  • Method for fabricating MEMS friction sensor based on visual alignment
  • Method for fabricating MEMS friction sensor based on visual alignment

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Embodiment 1

[0045] The structure of the MEMS friction sensor of the present embodiment is as figure 1 , figure 2 As shown, it is decomposed into package cover plate 1, floating element 2, silicon microstructure 3, electrode substrate 4, interface circuit 5 and package base 6, which are processed separately and then assembled. Package base 6 includes package positioning boss 8. Wherein, the floating element 2 includes a measuring head 9, a pole 10 and a positioning step 11, such as image 3 As shown; the silicon microstructure 3 includes a support frame 12, a torsion beam 13 and a vibrating plate 14, such as Figure 4 Shown; Electrode substrate 4 comprises lead electrode 15, glass boss 16 and gold electrode 17, as Figure 5 As shown; the vibrating plate 14 of the silicon microstructure 3 and the gold electrode 17 of the electrode substrate 4 form a differential sensitive capacitive element 18 to realize differential capacitance detection, as Image 6 As shown; the floating element 2, t...

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Abstract

The invention discloses a method for fabricating a MEMS friction sensor based on visual alignment. The MEMS friction sensor is decomposed into five parts of a floating component, a silicon microstructure, an electrode substrate, an interface circuit and a package tube. The silicon microstructure and the electrode substrate are fabricated by a MEMS process, the floating component and the package tube are fabricated by precision machining processing technology, and the interface circuit is fabricated by ceramic-based precision micro-strip circuit technology. The MEMS friction sensor uses specialmicro-assembly equipment and micro-assembly process, the micro-assembly equipment consists of a precision vision positioning system, a three-degree-of-freedom micro-operation alignment platform, a vacuum nozzle and an image recognition system, and the assembly of the MEMS friction sensor is completed by using the visual precision positioning and micro-operation alignment technology. The method for fabricating the MEMS friction sensor based on visual alignment provided by the invention improves the processing and assembly precision of the MEMS friction sensor, thereby improving the accuracy ofmeasuring the frictional resistance of the surface in the hypersonic wind tunnel.

Description

technical field [0001] The invention belongs to the field of micromechanical sensors in microelectromechanical systems, in particular to a method for manufacturing a MEMS friction sensor based on visual alignment, in particular to a MEMS suitable for accurate measurement of surface frictional resistance in a hypersonic wind tunnel flow field Fabrication method of friction sensor. Background technique [0002] The MEMS friction sensor is mainly used to test the surface friction resistance of the aircraft, and then determine the size and distribution of the aircraft surface friction resistance, which is of great significance to the design of the aircraft. The traditional surface friction resistance test device is mainly a micro-strain friction balance, but it is difficult to be widely used in the field of aircraft design due to the limitations of sensitivity, temperature, volume and cost. The MEMS friction sensor based on micro-electromechanical system technology has outstand...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00G01L1/18
CPCB81C1/00G01L1/18
Inventor 王雄许晓斌朱涛高扬陈立国王南天邱华诚史云龙
Owner 中国空气动力研究与发展中心超高速空气动力研究所
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