Laser shear speckle interferometry defect detecting system based on image registration and fusion
A defect detection and image registration technology, applied in the field of defect detection, can solve problems such as complex system establishment, expensive spatial light modulator, difficult signal separation, etc., to overcome low precision, fast visual detection of defects, and high cost of complex optical path Effect
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[0032] figure 1 It is a principle diagram of the laser shearing speckle interference defect detection system based on image registration and fusion of the present invention.
[0033] In this example, if figure 1 As shown, the laser shearing speckle interference defect detection system based on image registration and fusion of the present invention includes: laser light source, beam expander, beam splitter, shearer, phase shifter, image collector and integrated image processing Algorithm and phase shifter control algorithm PC;
[0034] In this embodiment, the laser light source is a helium-neon laser; the cutter includes a five-fifth beam splitter, a phase shift mirror and a shear mirror; the phase shifter is a piezoelectric ceramic phase shifter; the image collector uses a double CCD Camera, wherein, the CCD1 camera is used to collect the original image, and the CCD2 camera is used to collect the laser shearing scattered interference fringe image;
[0035] figure 2 It is ...
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