Torsion angle dynamic measuring device and method based on piezoelectric deflection table

Abstract

The invention relates to a torsion angle dynamic measuring device and method based on a piezoelectric deflection table. The device comprises two parts which are a reference emitting light pipe and a measuring light pipe; an optical fiber coupled laser A(1) is used as a point light source, linearly polarized light is formed after light passes through a polarizing plate (13) of a torsion sensitive assembly A(2), parallel light is formed after the light passes through a collimating objective lens (3) and is irradiated to the measuring light pipe, the measuring light pipe receives linearly polarized parallel light through a receiving objective lens (4), and angular movement of a polarizing plate of a torsion sensitive assembly B(6) is enabled via the piezoelectric deflection table (5); a polarization detection PSD detector (11) outputs a maximum current when the polarizing plate of the torsion sensitive assembly B(6) is in the same polarization direction as the linearly polarized light. Adeflection angle of the polarizing plate of the torsion sensitive assembly B(6) is a torsion angle. The invention relates to the device and the method for combining a compact optical-mechanical structure and a high-sensitivity electronic system to complete fast and high-precision measurement of the torsion angle.

Description

technical field [0001] The invention relates to a dynamic measurement device and method for a torsion angle based on a piezoelectric tilt table, which is applied to the measurement of deformation angles of large structures and belongs to the field of photoelectric measurement. Background technique [0002] In the field of precision machining, assembly and dynamic monitoring of large-scale long-baseline structures, the deformation measurement device is used to complete the relative deformation angle measurement in the three directions of azimuth, pitch and torsion between two measurement points. Among the three deformation angles, the azimuth and pitch angles can be obtained by collimation measurement, but it is more difficult to obtain the torsion angle. [0003] The high-precision measurement of the torsion angle commonly used at present mainly includes establishing a relative reference for measurement and measurement based on image processing. Among them, the relative ref...

AI Technical Summary

Problems solved by technology

Among them, the relative reference measurement is mainly to establish a rigid reference comparable to the distance between measurements, and the equipment is bulky and expensive; while the measurement method based on image processing relies on cameras and image processing algorithms, such as moiré fringe measurement and feature pattern matching etc., its precision and dynamic performance are subject to hardware platform processing performance and algorithm complexity

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