Graphene electrooptical modulator and preparing method thereof

Abstract

The invention is applicable to an electrooptical modulator, and provides a graphene electrooptical modulator and a preparing method thereof. The graphene electrooptical modulator comprises a substrate, a double-layer graphene perpendicular narrow slit optical waveguide structure, a first electrode, a second electrode, a light input end and a light output end, wherein the double-layer graphene perpendicular narrow slit optical waveguide structure, the first electrode, the second electrode, the light input end and the light output end are formed on the substrate, the double-layer graphene perpendicular narrow slit optical waveguide structure comprises a perpendicular narrow slit optical waveguide composed of a first high refractive index material layer, a low refractive index material layerand a second high refractive index material layer, a first graphene layer, an insulating material layer and a second graphene layer. The narrow slit optical waveguide can improve the limiting effect on a TE mode, so that mode fields distributed in the TE mode in a narrow slit area are increased, the mutual effect of double-layer graphene covering the upper layer is improved, and the modulating efficiency of the modulator is improved. By means of the light modulator made from double-layer graphene, since the transferring speed of a current carrier of the light modulator is high, the response speed of the modulator can be increased.

Description

technical field [0001] The invention belongs to the field of electro-optic modulators, in particular to a graphene electro-optic modulator and a preparation method thereof. Background technique [0002] In optoelectronic integrated circuits, optical modulators are one of the most important integrated devices, which convert electrical signals into optical data at a high bit rate. Optical modulators use materials with thermo-optic effects, electro-optic effects, magneto-optical effects, and electro-absorption effects to modulate the phase, amplitude, and polarization of light. Commonly designed device types include Mach-Zehnder interferometer, ring resonator, and germanium-based electroabsorption modulator, but they all have many disadvantages, such as: low modulation efficiency, slow response rate, small operating bandwidth, temperature sensitivity, volume Big wait. Contents of the invention [0003] The purpose of the embodiments of the present invention is to provide a ...

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Problems solved by technology

[0003] The purpose of the embodiments of the present invention is to provide a graphene electro-optic modulator and its preparation method to solve the problems of large volume and low electro-optic modulation efficiency of the prior art electro-optic modulator

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