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Double-stator fixed piezoelectric inertial actuator and drive method therefor

A driving method and fixed technology, applied in the direction of piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc., can solve the problems of small load output, poor motion stability, complex structure, etc. , to achieve the effect of reducing the displacement return rate, strong load capacity and increasing friction driving force

Active Publication Date: 2018-06-15
CHANGCHUN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problems of complex structure, small load output and poor motion stability in traditional driving motors, the present invention discloses a double-stator fixed piezoelectric inertia driver and its driving method

Method used

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  • Double-stator fixed piezoelectric inertial actuator and drive method therefor
  • Double-stator fixed piezoelectric inertial actuator and drive method therefor
  • Double-stator fixed piezoelectric inertial actuator and drive method therefor

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specific Embodiment approach 1

[0031] Specific implementation mode one: combine Figure 1~Figure 11 Describe this embodiment, this embodiment provides a specific implementation of a double-stator fixed piezoelectric inertia driver, the specific implementation of a double-stator fixed piezoelectric inertia driver is expressed as follows:

[0032] The dual-stator fixed piezoelectric inertial driver is composed of a cable-stayed stator assembly 1 , a mover assembly 2 , a sliding boss 3 , a micro-displacement adjustment device 4 and a base 5 .

[0033] The cable-stayed stator assembly 1 includes a square gasket 1-1, a hinge fixing bolt 1-2, a kimmie screw 1-3, a rectangular structural hinge 1-4 and a piezoelectric stack 1-5. The square washer 1-1 and Kimi screw 1-3 fix the piezoelectric stack 1-5 in the rectangular structural hinge 1-4. The piezoelectric stacks 1-5 can be products from PI or NEC. The square spacer 1-1 is made of tungsten steel, the purpose is to protect the piezoelectric stack 1-5 and prevent...

specific Embodiment approach 2

[0038] Specific implementation mode two: combination Figure 11~12 To illustrate this embodiment, this embodiment proposes a specific implementation of a double-stator fixed piezoelectric inertia driver driving method, and the double-stator fixed piezoelectric inertia driver driving method is expressed as follows:

[0039] The driving method of the double-stator fixed piezoelectric inertia driver can be divided into output enhancement type and motion emergency stop type. The main reason is that the double-stator fixed piezoelectric inertia driver adopts a cable-pull motion converter 1-4-7 structure, so that The uneven distribution of the axial stiffness of the cable-stayed stator assembly 1 produces lateral displacement. Adjust the positive contact pressure between the cable-stayed stator assembly 1 and the mover assembly 2, and then adjust the cable-stayed stator assembly 1 and the mover assembly. 2; at the same time, under the excitation of different combinations of asymmetr...

specific Embodiment approach 3

[0063] Specific implementation mode three: combination Figure 11 , 13 , 14 This embodiment is described. This embodiment proposes a specific embodiment of a double-stator fixed piezoelectric inertia driver driving method in which the cable-stayed stator assembly 1 is installed back-to-back. The driving method of the double-stator fixed piezoelectric inertial driver is expressed as follows:

[0064] Cable-pull stator assembly 1. The driving method of the double-stator fixed piezoelectric inertia driver installed back to back can be divided into output enhancement type and motion emergency stop type, mainly the double-stator fixed piezoelectric inertia driver installed back-to-back. The inertial driver adopts a cable-stayed motion converter 1-4-7 structure, which makes the axial stiffness distribution of the cable-stayed stator assembly 1 uneven and produces lateral displacement. Adjust the distance between the cable-stayed stator assembly 1 and the mover assembly 2. The posi...

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Abstract

The invention discloses a double-stator fixed piezoelectric inertial actuator and a drive method therefor to solve the technical problems of small output thrust, small stroke and low precision due tothe fact that single stator drive is adopted by an existing piezoelectric stick-slip linear motor. The double-stator fixed piezoelectric inertial actuator comprises oblique-pull stator assemblies, a rotor assembly, a sliding boss, a micro-displacement adjuster and a base. The oblique-pull stator assemblies adjust the positive contact pressure between the oblique-pull stator assemblies and the rotor assembly through generating lateral displacement to achieve comprehensive adjustment and control on the frictional force; and meanwhile, the oblique-pull stator assemblies are excited through different asymmetric electrical signal combinations, so that multiple drive modes, such as an output enhancement drive mode and a moving crashstop drive mode can be achieved. The double-stator fixed piezoelectric inertial actuator has the characteristics of being simple in structure, high in load capacity and stable in movement, and has a good application prospect in the field of micro-nano precision driving and positioning, such as optical precision instrument and semiconductor processing.

Description

technical field [0001] The invention relates to a double-stator fixed piezoelectric inertia driver and a driving method thereof, belonging to the technical field of micro-nano precision driving and positioning. Background technique [0002] Due to the rapid development of micro-nano technology, traditional macroscopic large-scale driving devices, such as ordinary motors, gear transmissions, screw nuts, worm gears, etc., have been difficult to meet the precision requirements of modern technology. All kinds of precision and ultra-precision machining and measurement technology, micro-electromechanical systems, precision optics, semiconductor manufacturing, modern medicine and biogenetic engineering, aerospace, robotics, military technology and other high-end scientific and technological fields are in urgent need of sub-micron, micro-nano Class precision drive motor. The discovery of the inverse piezoelectric effect of piezoelectric materials and the emergence of piezoelectric ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/06H02N2/04
CPCH02N2/04H02N2/043H02N2/06H02N2/062
Inventor 程廷海卢晓晖唐晚静宁鹏房彦旭陈昭旭
Owner CHANGCHUN UNIV OF TECH
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