MEMS microstructure three-axis type base excitation device based on piezoelectric ceramic

Abstract

The invention discloses an MEMS microstructure three-axis type base excitation device based on piezoelectric ceramics. The excitation device comprises a sleeve, a piezoelectric ceramic, a pressure sensor, an upper connecting block, a steel ball, a lower connecting block, an elastic supporting part and an MEMS microstructure; an electric lead screw transmission mechanism is arranged at the lower part in the sleeve, and is used for driving the lower connecting block to move; conical grooves and spherical grooves are formed in the opposite surfaces of the upper connecting block and the lower connecting block, the piezoelectric ceramic is clamped between the pressure sensor and the elastic supporting piece; guide shafts are uniformly distributed in the sleeve in the circumferential direction,and sliding seats are arranged on the guide shafts respectively, and the upper connecting block is connected with each sliding seat through a tension spring. According to the device, pre-tightening force of different sizes can be applied to the stacked piezoelectric ceramics, meanwhile, the obtained pre-tightening force measurement value is more accurate, so that the adjustment process of the parallelism error of the two working surfaces of the stacked piezoelectric ceramic can be smoother, the falling of the micro-devices for testing can be avoided, and dynamic characteristic parameters canbe tested conveniently.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronic systems, in particular to a MEMS microstructure three-axis base excitation device based on piezoelectric ceramics. Background technique [0002] Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content. [0003] In order to test the dynamic characteristic parameters of the microstructure, it is first necessary t...

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Problems solved by technology

[0006] 2. There is no direct connection between the upper connection block and the lower connection block and the sleeve, but are installed in the sleeve in turn by means of clearance fit. If the parallelism error of the two working surfaces of the stacked piezoelectric ceramics is large , there is not enough space to adjust the movable base structure;

[0007] 3. The pressure sensor is installed at the bottom of the lower connecting block. Since the movable base structure adjusts itself, there is a certain inclination between the bottom of the lower connecting block and the working surface of the piezoelectric ceramic, so the pre-tightening force measured by the pressure sensor Or the output force of piezoelectric ceramics is not accurate; in addition, if the movable base structure causes the upper coupling block or the lower coupling block to contact the sleeve after adjustment, the error of the measurement result will further increase;

[0009] 5. In this device, gaskets of different thicknesses are used to change the magnitude of the pre-tightening force applied to the stacked piezoelectric ceramics, which makes the adjustment process complicated and not flexible enough

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