Four-axis type excitation device capable of dynamically driving MEMS microstructure

Abstract

The invention discloses a four-axis type excitation device capable of dynamically driving a MEMS microstructure, which comprises a sleeve, a bottom plate, a piezoelectric ceramic, a pressure sensor, an upper connecting block, a lower connecting block, an elastic supporting part and an MEMS microstructure, wherein an annular top plate is arranged at the upper end of the sleeve; the microstructure is arranged on the annular top plate through the elastic supporting part; guide shafts are uniformly distributed between the annular top plate and the bottom plate; the lower connecting block is uniformly provided with a guide support arm, penetrates through the sleeve wall and sleeves the guide shafts; a spherical bulge is arranged at the center of the bottom surface of the upper connecting block;tension springs are uniformly distributed between the bottom surface of the upper connecting block and the guide support arm of the lower connecting block; the spherical bulge is elastically pressedon the lower connecting block through the tension springs; and the piezoelectric ceramic is clamped between the pressure sensor and the elastic supporting part. According to the device, pre-tighteningforce of different sizes can be applied to the piezoelectric ceramic, so that the obtained pre-tightening force measurement value is more accurate, the adjustment process of compensating the parallelism error of the two working surfaces of the piezoelectric ceramic becomes smoother and smoother, and dynamic characteristic parameters can be conveniently tested.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronic systems, in particular to a four-axis excitation device capable of dynamically driving MEMS microstructures. Background technique [0002] Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content. [0003] In order to test the dynamic characteristic parameters of the microstructure, it is first necessary to make...

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Problems solved by technology

[0006] 2. There is no direct connection between the upper connection block and the lower connection block and the sleeve, but are installed in the sleeve in turn by means of clearance fit. If the parallelism error of the two working surfaces of the stacked piezoelectric ceramics is large , there is not enough space to adjust the movable base structure;

[0007] 3. The pressure sensor is installed at the bottom of the lower connecting block. Since the movable base structure adjusts itself, there is a certain inclination between the bottom of the lower connecting block and the working surface of the piezoelectric ceramic, so the pre-tightening force measured by the pressure sensor Or the output force of piezoelectric ceramics is not accurate; in addition, if the movable base structure causes the upper coupling block or the lower coupling block to contact the sleeve after adjustment, the error of the measurement result will further increase;

[0009] 5. In this device, gaskets of different thicknesses are used to change the magnitude of the pre-tightening force applied to the stacked piezoelectric ceramics, which makes the adjustment process complicated and not flexible enough

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