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Super junction device manufacturing method and device structure

A technology of super junction devices and manufacturing methods, applied in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve the problems of high production costs, achieve low production costs, and improve the softness factor of reverse recovery.

Active Publication Date: 2018-06-05
深圳尚阳通科技股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Multiple epitaxy has the advantages of simple process realization, but high production cost

Method used

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  • Super junction device manufacturing method and device structure
  • Super junction device manufacturing method and device structure
  • Super junction device manufacturing method and device structure

Examples

Experimental program
Comparison scheme
Effect test

no. 1 example approach

[0057] like Figure 4 Shown is the flow chart of the method of the first embodiment of the present invention; as Figure 5A to Figure 5F As shown, it is a device structure diagram in each step of the method of the first embodiment of the present invention; in the manufacturing method of the super-junction device in the first embodiment of the present invention, an N-type super-junction device is taken as an example for illustration, and the second conductivity type is N-type, the second conductivity type is P-type; comprising the following steps:

[0058] Step 1, such as Figure 5A As shown, a trench 101 is formed in the N-type epitaxial layer 7 .

[0059] The N-type epitaxial layer 7 is formed on the wafer surface composed of a semiconductor substrate such as a silicon substrate 9 . The semiconductor substrate 9 is N+ doped, and the doping concentration is usually 2e19cm -3 ~2e20cm -3 The corresponding resistivity is between 0.5mohm and 3mohm; the high doping concentrati...

no. 2 example approach

[0080] The difference between the method of the second embodiment of the present invention and the method of the first embodiment of the present invention is:

[0081] like Figure 7 Shown is a device structure diagram formed in the steps of the method of the second embodiment of the present invention. In the method of the second embodiment of the present invention, the side wall ion implantation adopts two N-type ion implantations, mainly because the implantation angle is changed to α 2 , that is, two α 2 .

[0082] Specifically, the N-type doping increased region 203 is formed by N-type ion implantation when α is 11 degrees, which is the same as the method in the first embodiment of the present invention, and the implantation angle of 11 degrees is within 20 μm from the surface. The sidewalls are implanted with N-type impurities.

[0083] The N-type doping increased region 203a is increased once α 2 It is formed by N-type ion implantation at 20 degrees, and at an implan...

no. 3 example approach

[0085] The difference between the method of the third embodiment of the present invention and the method of the first embodiment of the present invention is:

[0086] In the method according to the third embodiment of the present invention, one N-type ion implantation and one P-type ion implantation are used for the sidewall ion implantation.

[0087] The sidewall ion implantation also includes at least one P-type ion implantation, the implantation region corresponding to the P-type ion implantation is located at a certain depth downward from the top surface of the trench 101 and the P-type ion implantation The formula of the implantation region corresponding to the implantation is the same as the formula of the implantation region corresponding to the N-type ion implantation.

[0088] After the implantation region corresponding to the P-type ion implantation is superimposed on the implantation region corresponding to the N-type ion implantation, the N-type doping in the overl...

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Abstract

The invention discloses a super junction device manufacturing method, which comprises the steps of: forming trenches in a first conduction type epitaxial layer; performing angled sidewall ion implantation and forming first conduction type doping increase regions in selected regions of the sidewalls of each trench; filling each trench with a second conduction type epitaxial layer; and carrying outannealing, forming side surface recessed structures of second conduction type columns in the first conduction type doping increase regions by utilizing different transverse diffusion rates inside andoutside the first conduction type doping increase regions of second conduction type impurities, and improving softness factors of reverse recovery of a super junction device by means of the side surface recessed structures. The invention further discloses the super junction device. The super junction structure disclosed by the invention is formed by adopting a trench filling process, and can improve the softness factors of the reverse recovery of the super junction device.

Description

technical field [0001] The invention relates to the field of manufacturing semiconductor integrated circuits, in particular to a method for manufacturing a super junction device; the invention also relates to a super junction device. Background technique [0002] The super junction structure is composed of alternately arranged N-type pillars and P-type pillars. If the superjunction structure is used to replace the N-type drift region in the vertical double-diffused MOS transistor (Vertical Double-diffused Metal-Oxide-Semiconductor, VDMOS) device, the conduction path is provided through the N-type column in the conduction state, and when the conduction The P-type column does not provide a conduction path; in the off state, the PN column jointly bears the reverse bias voltage, forming a super-junction metal-oxide-semiconductor field-effect transistor (Metal-Oxide-Semiconductor Field-Effect Transistor, MOSFET). like figure 1 Shown is a structural diagram of an existing super-...

Claims

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Application Information

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IPC IPC(8): H01L21/336H01L21/265
CPCH01L21/265H01L29/66234
Inventor 曾大杰
Owner 深圳尚阳通科技股份有限公司
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