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Piezoelectric-electromagnetic hybrid vibration energy collector and preparation method thereof

A technology of vibration energy collection and electromagnetic compounding, which is applied in the direction of piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc., can solve the problems of low energy collection efficiency, single vibration pickup structure, output Low current and other problems, to achieve the effect of compact structure, small size and high output power density

Active Publication Date: 2018-04-20
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Piezoelectric and electromagnetic energy harvesters have their own advantages and disadvantages: piezoelectric energy harvesters have high output voltage but low output current; electromagnetic energy harvesters are just the opposite
However, the vibration in the environment has the characteristics of wide frequency band and changeability. On the other hand, most of the current piezoelectric-electromagnetic composite vibration energy harvesters only have a single vibration pickup structure (or resonance frequency), and its energy harvesting efficiency lower

Method used

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  • Piezoelectric-electromagnetic hybrid vibration energy collector and preparation method thereof
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Embodiment 1

[0034] see figure 1 and figure 2 , the present invention provides a piezoelectric-electromagnetic composite vibration energy harvester, the piezoelectric-electromagnetic composite vibration energy harvester has multiple vibration pickup structures and resonance frequencies, and can obtain high energy collection efficiency.

[0035] The piezoelectric-electromagnetic composite vibration energy harvester includes: a first substrate 10, a second substrate 20 and a third substrate 30 stacked on each other; the first substrate 10 and the third substrate 30 are respectively formed by etching The first and second cantilever beam structures, wherein a first groove 19 is formed on the lower surface of the first substrate 10, a first cantilever beam structure is formed above the first groove 19, and a first cantilever beam structure is formed on the upper surface of the third substrate 30. Below the second groove 39 and the second groove 39 is a second cantilever beam structure.

[00...

Embodiment 2

[0054] The present invention also provides a preparation method of a piezoelectric-electromagnetic composite vibration energy harvester, the preparation method comprising the following steps:

[0055] A first substrate is selected, and the lower surface of the first substrate is etched to form a first groove structure. For example, N(100) silicon with a thickness of 500 μm is selected as the first substrate, and Si with a thickness of 200 nm is grown on the lower surface of the substrate by, for example, a low-pressure chemical vapor deposition method. 3 N 4 ; Etching the Si on the lower surface of the first substrate 3 N 4 , with Si 3 N 4 Use TMAH (tetramethylammonium hydroxide) reagent as a mask to perform wet etching on the silicon substrate to form a first groove as deep as 450 μm.

[0056] A first inductive coil layer is formed by depositing and etching on the first piezoelectric layer. Specifically, when using H 3 PO 4 solution to remove Si from silicon wafer sur...

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Abstract

The invention provides a piezoelectric-electromagnetic hybrid vibration energy collector and a preparation method thereof. The vibration energy collector comprises a first substrate, a second substrate and a third substrate, wherein the first substrate, the second substrate and the third substrate are stacked on each other. The first substrate and the third substrate are etched to form first and second cantilever structures respectively. A first groove is formed on the lower surface of the first substrate. The first cantilever structure is above the first groove. A second groove is formed on the upper surface of the third substrate. The second cantilever structure is below the second groove. The third groove and the fourth groove are formed at corresponding positions on upper and lower surfaces of the second substrate, and three groups of vibration pickup structures with different resonant frequencies are assembled. The vibration energy collector prepared by the preparation method hasthe advantages of high energy collection efficiency, output power and output power density (W / cm<2>), small size, high precision, easy mass production, low manufacturing cost and easy miniaturization..

Description

【Technical field】 [0001] The invention relates to an energy harvester for collecting vibration energy in the environment and a preparation method thereof, in particular to a composite resonant vibration energy harvester based on the principles of piezoelectric effect and electromagnetic induction and a preparation method thereof. 【Background technique】 [0002] Energy harvesters can pick up environmental energy (such as radiation, temperature difference, vibration, etc.) and convert it into electrical energy to power the system. Compared with traditional electrochemical batteries, energy harvesters have the advantages of being economical, environmentally friendly and theoretically unlimited in life, so they are in line with the future development trend of energy and are very suitable for providing electrical energy for emerging fields such as the Internet of Things and wearable devices. Solar energy, electromagnetic radiation, temperature difference, vibration, etc. are all ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/18H02K35/04
CPCH02K35/04H02N2/188H02N2/22
Inventor 黄晓东黄见秋黄庆安
Owner SOUTHEAST UNIV
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