Low-temperature microwave source, low-temperature microwave source chip and manufacturing method thereof
A microwave source, low temperature technology, applied in the manufacture/processing of superconductor devices, semiconductor devices, electrical components, etc., can solve the problems of high noise, microwave signals cannot meet the requirements of solid-state quantum chip manipulation and quantum computing, etc.
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[0095] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0096] An embodiment of the present invention provides a low-temperature microwave source chip, specifically, as figure 1 As shown, it is a top view of the low-temperature microwave source chip, which includes a substrate 1 and a transmission cavity 2 on the surface of the substrate 1, a bias junction 4, a voltage bias line 5, and a DC bias line 3 .
[0097]Wherein, the substrate 1 is a semiconductor substrate, such as silicon or sapphire. Since the dielectr...
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