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Pyroelectric non-refrigeration self selective frequency infrared detector in stereo double-layer structure

An infrared detector and a double-layer structure technology, applied in the field of infrared detection, can solve the problems of increasing system complexity, CMOS process compatibility, and high cost, and achieve the effects of improving space utilization, high Seebeck coefficient, and low production cost

Pending Publication Date: 2017-11-17
成都市亿泰科技有限公司
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  • Application Information

AI Technical Summary

Problems solved by technology

Although the infrared absorber based on black gold and carbon nanotubes has extremely high absorption efficiency, it is difficult to be compatible with the CMOS process, and the cost is high. When detecting a specific wavelength, an optical filter is required, which increases the complexity of the system.

Method used

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  • Pyroelectric non-refrigeration self selective frequency infrared detector in stereo double-layer structure
  • Pyroelectric non-refrigeration self selective frequency infrared detector in stereo double-layer structure
  • Pyroelectric non-refrigeration self selective frequency infrared detector in stereo double-layer structure

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Embodiment Construction

[0027] Below knot and accompanying drawing and specific embodiment are further described invention:

[0028] like figure 1 As shown, a pyroelectric uncooled self-selectable frequency infrared detector with a three-dimensional double-layer structure includes a silicon substrate 1, a plurality of thermocouples 2 with a three-dimensional double-layer structure, a self-selectable frequency infrared absorber 3 with a three-layer structure, Contact high electrode 4 , contact low electrode 5 and silicon dioxide film 6 .

[0029] like figure 2 As shown, the silicon substrate 1 and the silicon dioxide film 6 form a cubic structure. The center of the silicon substrate 1 is a cavity, and a silicon dioxide film 6 is attached to the silicon substrate 1 to cover one end of the cavity.

[0030] like image 3 As shown, a self-selectable frequency infrared absorber 3 with a three-layer structure includes a titanium nitride nano-film 8 , a dielectric layer 9 and a high-conductivity metal r...

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Abstract

The invention discloses a pyroelectric uncooled infrared detector with a three-dimensional double-layer structure, which belongs to the field of infrared detection. The invention includes a silicon substrate, a plurality of thermocouples with a three-dimensional double-layer structure, a self-selecting frequency infrared absorber with a three-layer structure, a contact high electrode, a contact low electrode and a silicon dioxide film, and is compatible with CMOS technology. The invention adopts a thermocouple with a three-dimensional double-layer structure, which has higher space utilization rate, better responsivity, detection sensitivity and noise equivalent power than the traditional planar thermocouple, and greatly improves the performance of the device; A self-selecting frequency infrared absorber with a three-layer structure does not require additional filters, and it absorbs almost 100% of specific wavelength bands.

Description

technical field [0001] The invention belongs to the field of infrared detection, in particular to a pyroelectric self-selecting frequency cold infrared detector with a three-dimensional double-layer structure compatible with CMOS technology. Background technique [0002] Infrared detection technology has become one of the important technical indicators to measure a country's scientific and technological strength, and it is fully reflected in the major needs of many countries. As a branch of infrared detection technology, uncooled infrared detection technology is playing an increasingly important role due to its low power consumption and wide response spectrum, driven by continuous demand in national defense and civilian applications. The uncooled infrared detection technology based on pyroelectric materials (pyroelectric detection) has been widely used in many fields such as national defense security, medicine, and security because of its fast response speed and high perform...

Claims

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Application Information

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IPC IPC(8): G01J5/14
CPCG01J5/14
Inventor 袁飞周虎川杨帆高豪
Owner 成都市亿泰科技有限公司
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