Reaction control and mass spectrometry setup for in situ cell coupling of x-ray characterization equipment

Abstract

The invention relates to a reaction control and mass spectrometry analysis station for the in-situ pool of X-ray characterization equipment. The reaction control and mass spectrometry analysis station includes a reaction gas composition control module and an online gas composition analysis module. The content of the invention also includes There is a modification of the vacuum pipeline part. After the modification, the original vacuum pipeline part is connected to the analysis station through the main exhaust port, the tail gas port of the in-situ reaction tank and the mixed gas inlet of the in-situ reaction tank. The modification is characterized in that the vacuum pipeline The mass spectrometer sampling port, sampling capillary and control valve are partially added. The present invention has the following advantages: the sampling time delay is negligible during mass spectrometry gas sampling component analysis, and the sampling analysis requirements of continuous, real-time and high time resolution of in-situ analysis are achieved; under the working conditions of X-ray characterization equipment, the obtained At the same time as the electronic structure / crystal structure, the precise information of the ambient gas composition is obtained simultaneously, which expands the device function and realizes in-situ multi-dimensional characterization.

Description

technical field [0001] The invention belongs to the field of online reaction control, component detection and kinetic characterization of basic chemical reaction kinetics research. Simultaneous expansion of crystal or electronic structure functions, simultaneous real-time and continuous recording of reactive gas components in the environment in which they are located, and establishment of mutual connections between the two. The invention is also suitable for real-time and continuous detection of gas components in other similar radiation environments. Background technique [0002] X-ray spectroscopy equipment has a special measurement condition, that is, a radioactive environment. According to the structure of its observation settings, it provides characterization of the basic properties such as the crystal structure and electronic structure of the measurement object, such as X-ray diffraction device (XRD), small-angle X-ray scattering (SXAS), X-ray Absorption Spectroscopy (...

AI Technical Summary

Problems solved by technology

[0005] At present, third-party manufacturers have designed in-situ reaction cells for many X-ray spectroscopy characterization instruments, but basically there is no supporting reaction gas composition control scheme and online gas composition analysis

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