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A kind of thermal shock-resistant high-temperature composite insulation layer and its preparation method

A technology of composite insulation and thermal shock resistance, applied in the direction of coating, superimposed layer plating, metal material coating process, etc., can solve the problems of inability to form a uniform and dense insulating layer, unsatisfactory actual effect, and high energy of metal atoms, and achieve The composite insulation layer is uniform and dense, avoiding cracking and falling off, and improving the effect of stability and reliability

Inactive Publication Date: 2019-12-10
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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Problems solved by technology

This method has achieved good results on metal flat plates; however, the actual effect is always unsatisfactory when faced with special-shaped precision structural parts such as turbine blades
In the large-angle bending and folding parts of special-shaped structural parts, sputtering or evaporation technology cannot form a uniform and dense insulating layer. When the metal-sensitive functional layer is prepared by subsequent sputtering, the sputtered metal atoms have high energy and are easy to penetrate. The conduction phenomenon occurs due to the insulating layer, which makes the thin film sensor invalid

Method used

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  • A kind of thermal shock-resistant high-temperature composite insulation layer and its preparation method
  • A kind of thermal shock-resistant high-temperature composite insulation layer and its preparation method
  • A kind of thermal shock-resistant high-temperature composite insulation layer and its preparation method

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Embodiment Construction

[0022] The present invention will be further described in detail below with reference to the drawings and embodiments

[0023] The invention provides a high-temperature composite insulating layer resistant to thermal shock, such as figure 1 As shown, it includes a two-layer structure, with Al from bottom to top 2 O 3 ~Al-O-N gradient layer and microcrystalline Al 2 O 3 Thin film insulating layer; the Al 2 O 3 ~The bottom layer of the Al-O-N gradient layer is Al 2 O 3 The top layer is an amorphous Al-O-N film layer, and the N element content increases along the film growth direction. The thin film sensor using the composite insulating layer includes a six-layer structure, such as figure 2 As shown, from bottom to top, alloy substrate 1, NiCrAlY alloy transition layer 2, thermally grown Al 2 O 3 Layer 3, composite insulating layer 4, sensitive functional layer 5 and Al 2 O 3 Protective layer 6; the preparation method of the thin-film sensor includes the following steps:

[0024] Step...

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Abstract

The invention belongs to the technical field of thin film sensors, and provides a thermal shock-resistant high-temperature composite insulating layer and a preparation method thereof; the composite insulating layer includes a two-layer structure, which is Al from bottom to top 2 o 3 ~ Al‑O‑N gradient layer and microcrystalline Al 2 o 3 thin film insulating layer; the Al 2 o 3 ~The bottom layer of the Al‑O‑N gradient layer is Al 2 o 3 layer, the top layer is an amorphous Al-O-N film layer, and along the film growth direction, the content of N element increases. The composite film insulating layer of the present invention can form uniform and dense coverage on different parts such as the plane, bending, and folding of special-shaped precision components, effectively improve the uniformity and high-temperature insulation performance of the insulating layer, and effectively ensure the reliability of the film sensor under high temperature conditions and stability; at the same time, the solution method is used to prepare, and the sol-gel method can easily complete the coating of larger workpieces, which is beneficial to the realization of batch production; and the sol-gel method is low in cost and easy to operate. These factors make the present invention provide Composite insulating layer has a broader application prospect.

Description

Technical field [0001] The invention belongs to the technical field of thin film sensors, especially thin film sensors for testing the surface state parameters of special-shaped hot end parts such as aeroengines. Such thin film sensors can be used for the surface temperature, strain, etc. of hot end parts such as combustion chamber walls of aeroengines and turbine blades. Accurate testing of state parameters provides technical support for the design and optimization of aero-engines; specifically, a high-temperature composite insulating layer with thermal shock resistance and a preparation method are provided. Background technique [0002] With the continuous development of aero engines in the direction of high Mach, high thrust-to-weight ratio, and high reliability, they need to work in harsh environments such as high temperature, high pressure, and high airflow for a long time. The temperature distribution and strain on the surface of the combustion chamber and turbine blades aff...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C28/00C23C18/12C23C14/16C23C14/08
CPCC23C14/081C23C14/165C23C18/1216C23C18/1254C23C18/1295C23C28/3215C23C28/345C23C28/36C23C28/40
Inventor 赵晓辉刘子良王洪敏蒋洪川蒋书文张万里
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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