A kind of lanthanum calcium manganese oxide-lanthanum strontium manganese oxide-strontium lead titanate composite thin film and preparation method thereof

A technology of lanthanum calcium manganese oxide thin film, strontium lead titanate, applied in metal material coating process, coating, liquid chemical plating, etc. Low temperature, improving the effect of room temperature magneto-capacitance effect

Active Publication Date: 2019-03-19
SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This will help to solve the problem that the magnetocapacitive effect cannot be obtained in a wide temperature range around room temperature in the world, and has positive significance for the multifunctional and practical development of devices.

Method used

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  • A kind of lanthanum calcium manganese oxide-lanthanum strontium manganese oxide-strontium lead titanate composite thin film and preparation method thereof
  • A kind of lanthanum calcium manganese oxide-lanthanum strontium manganese oxide-strontium lead titanate composite thin film and preparation method thereof
  • A kind of lanthanum calcium manganese oxide-lanthanum strontium manganese oxide-strontium lead titanate composite thin film and preparation method thereof

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preparation example Construction

[0030] The following examples illustrate the preparation method of the composite film, which may specifically include the following steps.

[0031] Substrate cleaning and pretreatment. First, the substrates are separately placed in acetone, ethanol and water for ultrasonic cleaning to remove dust or other impurities on the surface of the substrates, and then preferably annealed in a rapid annealing furnace for the purpose of enhancing the surface activity of the substrates.

[0032] Preparation of precursor solutions.

[0033] Add lanthanum acetate, calcium acetate and manganese acetate in a molar ratio into a mixed solution solvent consisting of acetic acid and water, and heat under reflux to completely dissolve the solvent. Then, an appropriate amount of stabilizer acetylacetone was added to the mixed solution, and heated to reflux. Finally, the mixed solution was filtered to obtain a stable lanthanum calcium manganese oxide precursor solution. The molar ratio of the thre...

Embodiment

[0041] (1) Cleaning of silicon substrates

[0042] First, the contaminants on the surface of the silicon substrate were blown off with nitrogen, and then the silicon wafers were placed in acetone, ethanol and deionized water for ultrasonic cleaning for 10 minutes. After cleaning, the substrates were dried at 450 °C, and then cooled naturally for use;

[0043] (2) Preparation of precursor solution

[0044] La:Ca:Mn element molar ratio is 0.7:0.3:1 lanthanum acetate, calcium acetate and manganese acetate are dissolved in a mixed solvent of acetic acid and deionized water, heated to 60 ~ 80 ° C to completely dissolve the solute, and then add complex mixture of acetylacetone, and continue to heat to make the solute react completely. The volume ratio of acetic acid and acetylacetone is 5:1:1, and the concentration of manganese in the solution is 0.15M / L. A stable LCMO thin film precursor solution is obtained by filtering the solution with a micron microporous filter;

[0045] La:...

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Abstract

The invention relates to a lanthanum calcium manganese oxygen-lanthanum strontium manganese oxygen-lead strontium titanate composite film and a preparation method thereof. The composite film comprises a lanthanum calcium manganese oxygen film layer, a lanthanum strontium manganese oxygen film layer and a lead strontium titanate film layer which are sequentially stacked on a substrate. The composite film provided by the invention is low in surface roughness, free of micro crack and stable in performance, has the advantages of being good in ferromagnetic property, ferroelectric property and indoor-temperature magnetocapacitance effect and the like, can be compatible with the semiconductor integrated circuit technology, and is high in applicability. The method provided by the invention is cheap in raw material, non-toxic, free of tocix gas emission in the preparation process, and low in environment pollution. The preparation technique is simple, no special equipment is needed, and scale production is facilitated.

Description

technical field [0001] The invention relates to a lanthanum calcium manganese oxide-lanthanum strontium manganese oxide-strontium lead titanate composite film and a preparation method thereof, belonging to the technical field of magnetoelectric composite materials. Background technique [0002] Magnetoelectric composites are a class of important functional materials that are composed of ferromagnetic materials and ferroelectric materials and can produce magnetoelectric effects. Utilizing the sensitivity of its capacitance or dielectric constant to external magnetic fields (magnetocapacitance effect) provides an additional degree of freedom for conventional device designs for magnetic field sensors, dielectric drivers, spin-to-charge converters, and tunable filtering It has potential important application prospects in microwave communication, information, computer, aerospace and other fields. [0003] Chaudhuri et al. (Journal of Applied Physics 106, 054103 (2009)) in (100) ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C18/12
CPCC23C18/1216C23C18/1225C23C18/1245C23C18/1254C23C18/1295
Inventor 董显林薛粉陈莹王根水
Owner SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI
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