Cluster ion beam nanometer processing equipment control device and control method thereof

A nanofabrication and equipment control technology, applied in the fields of nanostructure manufacturing, nanotechnology, nanotechnology, etc., can solve the problems of inability to measure the performance of nanoclusters, poor dynamic response performance, component deviation, etc., to improve the dynamic response performance, Guaranteed consistency and stability, guaranteed effect of particle size and purity requirements

Inactive Publication Date: 2017-06-13
佛山旋疯纳米科技有限公司
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Problems solved by technology

[0008] The purpose of the present invention is to provide a cluster ion beam nano-processing equipment control device and its control method, aiming to solve the problems of component deviation, phase pollution and inability to realize the performance of nano-clusters in the existing nano-processing technology. Problems such as poor measurement and dynamic response performance

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  • Cluster ion beam nanometer processing equipment control device and control method thereof
  • Cluster ion beam nanometer processing equipment control device and control method thereof
  • Cluster ion beam nanometer processing equipment control device and control method thereof

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[0031] In order to make the object, technical solution and advantages of the present invention more clear and definite, the present invention will be further described in detail below with reference to the accompanying drawings and examples.

[0032] see figure 1, a cluster ion beam nanoprocessing equipment control device provided by the present invention, including a system control board, a human-computer interaction module, a process control module, a data acquisition module, a nanoprocessing control module and a material delivery module, the human-computer interaction The module, the process control module, the data acquisition module, the nano-processing control module and the material delivery module are respectively electrically connected to the system control board. Through the human-computer interaction module, the user can control the setting and process of nanomaterial processing; through the process control module, the parameters such as temperature, pressure and ai...

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Abstract

The invention provides a cluster ion beam nanometer processing equipment control device and a control method thereof. The cluster ion beam nanometer processing equipment control device comprises a system control board, a human-computer interaction module, a process control module, a data acquisition module, a nanometer processing control module and a material conveying module, and the human-computer interaction module, the process control module, the data acquisition module, the nanometer processing control module and the material conveying module are electrically connected to the system control board respectively. The invention further provides a control method of cluster ion beam nanometer processing equipment. The particle size of the nanocluster is detected in real time, and the material is unloaded when a set condition is met. According to the cluster ion beam nanometer processing equipment control device and the control method thereof, the consistency and the stability of the particle size of the nanocluster are achieved, the component deviation and the phase contamination are reduced to the greatest extent, and the dynamic response performance of a system is drastically improved.

Description

technical field [0001] The invention relates to the field of nanomaterial processing, in particular to a cluster ion beam nanoprocessing equipment control device and a control method thereof. Background technique [0002] Nanomaterials are also called ultrafine crystal materials. The particle size of their clusters is between 1nm and 100nm. They have unique and excellent physical properties such as small size effects, quantum effects, interface effects and surface effects. They are used in ceramics, microelectronics , chemical, medical and other fields have broad application prospects. In the past ten years, the preparation methods, performance tests and theoretical explanations of nanomaterials have become hot research issues in various countries, and fruitful theoretical and applied research results have been achieved. [0003] As far as the processing technology of nanomaterials is concerned, there are mainly preparation methods such as mechanical ball milling method, mo...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B82B3/00H01J37/252B82Y40/00B82Y35/00
CPCB82B3/0004B82B3/008B82B3/0085B82Y35/00B82Y40/00H01J37/252
Inventor 李应高杨光永
Owner 佛山旋疯纳米科技有限公司
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