Piezoelectric thin film resonator, its manufacturing method and method for detecting coagulation time
A piezoelectric film and a manufacturing method, which are applied in the field of clinical medical testing, can solve the problems of high manufacturing difficulty, large external noise, and large amount of blood samples, and achieve the effects of accurate clotting time judgment, low output noise, and easy manufacturing.
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[0040] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments, but the present invention is not limited to these embodiments.
[0041] The piezoelectric thin film resonator used in the present invention is generally composed of a silicon substrate, a supporting film layer, a piezoelectric layer and electrodes, and its structure can be a diaphragm model, an air gap type, and a solid assembly type. In order to ensure that the thin film resonator can effectively resonate in the blood viscous environment, it is better to use a piezoelectric thin film resonator operating in the shear wave mode for the measurement of coagulation time. The electrodes of the piezoelectric thin film resonator can be arranged in parallel on the upper surface of the piezoelectric layer, or placed on both sides of the piezoelectric layer. The shape of the piezoelectric thin film resonator electrodes can be circular, square or ...
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