A high-precision temperature-controlled resistance test system

Abstract

The invention discloses a high-precision temperature-controlled resistance testing system, comprising: a sample platform for placing test samples, the sample platform is provided with a heat conduction plane, the heat conduction plane has a heat dispersion plane, and the test sample is placed On the heat dispersion plane; the heater, located under the sample platform, is used to heat the test sample on the sample platform to the test temperature; the infrared imaging temperature detector is used to measure the surface temperature of the test sample; the probe is used to test the sample When the surface temperature reaches the test temperature, the resistance test is performed on the test sample. The invention can realize the online calibration of the infrared imaging temperature detector while monitoring the temperature values ​​of all positions on the sample surface in real time, thereby ensuring the resistance test accuracy of any position on the sample surface.

Description

Technical field [0001] The present invention relates to the technical field of integrated circuit testing, and more specifically, to a high-precision temperature-controlled resistance testing system. Background technique [0002] The conventional temperature-controlled resistance test system uses a thermocouple to test the temperature at a fixed position on the sample, and after waiting for the temperature at the fixed position to reach the test temperature, the control system of the probe machine controls the probe to contact the surface of the sample. Resistance test at different positions on the sample surface at this temperature. [0003] However, the temperature inhomogeneity caused by the heating part / heat transfer part / sample itself, etc. will cause the temperature of not all positions on the sample surface to reach the test temperature, which will lead to test errors. [0004] At the same time, the accuracy of the thermocouple itself is relatively poor; when the sample to be...

AI Technical Summary

Problems solved by technology

[0003] However, due to temperature inhomogeneity caused by heating parts / heat transfer parts / sample itself, etc., the temperature of not all positions on the sample surface will reach the test temperature, thus causing test errors

[0004] At the same time, the accuracy of the thermocouple itself is relatively poor; when the samples to be tested use different materials, the contact characteristics between the thermocouple and different materials and how to calibrate on-line will further increase the error of the test temperature

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