Radio frequency switch device based on electrowetting driving principle and preparation method thereof

A radio frequency switch and electrowetting technology, applied in electronic switches, electrical components, pulse technology, etc., can solve problems such as difficult preparation, wear and loss, avoid electrochemical by-products or pollution, and overcome high toxicity.

Inactive Publication Date: 2017-05-10
FUDAN UNIV
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  • Abstract
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Problems solved by technology

[0004] The purpose of the present invention is to provide a radio frequency switch device based on the electrowetting driving principle and its preparation method. This device solves the problems of difficult preparation and wear and tear of traditional diode switches or micromechanical switches in the prior art, and can be passed through The electrowetting effect controls the position of the droplet, which in turn controls the on-off of the radio frequency circuit

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  • Radio frequency switch device based on electrowetting driving principle and preparation method thereof
  • Radio frequency switch device based on electrowetting driving principle and preparation method thereof

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Embodiment Construction

[0027] The technical solutions of the present invention will be further described below in conjunction with the drawings and embodiments.

[0028] Such as figure 1 As shown, it is a cross-sectional view of the radio frequency switch device based on the electrowetting driving principle of the present invention, the device includes: a lower plate 100, an upper plate 200, placed between the lower plate 100 and the upper plate 200 The droplet D.

[0029] Wherein, the lower plate 100 includes: a first substrate 105 , a driving electrode layer 104 , a dielectric layer 103 , a radio frequency electrode layer 102 and a first hydrophobic layer 101 arranged in sequence.

[0030] Wherein, the upper plate 200 includes: a second substrate 203 , a ground electrode 202 and a second hydrophobic layer 201 arranged in sequence.

[0031] Wherein, the droplet D is placed between the first hydrophobic layer 101 and the second hydrophobic layer 201 . Droplet D refers to a droplet that can be dri...

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Abstract

The invention discloses a radio frequency switch device based on the electrowetting driving principle and a preparation method thereof. The device comprises a lower polar plate, an upper polar plate and liquid drops placed between the lower polar plate and the upper polar plate. The lower polar plate comprises a first substrate, a driving electrode layer, a dielectric layer, a radio frequency electrode layer and a first hydrophobic layer, which are arranged in turn. The upper polar plate comprises a second substrate, a ground electrode and a second hydrophobic layer, which are arranged in turn. The liquid drops are placed between the first hydrophobic layer and the second hydrophobic layer. According to the radio frequency switch device disclosed by the invention, an aqueous solution is driven to move to different positions to control the on-off of a radio frequency circuit, so that the control is simple, the automation degree is high, and the application range of microfluidic, radio frequency switch and other techniques is greatly expanded.

Description

technical field [0001] The invention belongs to the field of radio frequency circuits and switches, and relates to microfluidic technology based on the principle of electrowetting and the absorption of high-frequency electromagnetic field energy by liquids, in particular to a radio frequency switch device based on the principle of electrowetting and a preparation method thereof. Background technique [0002] In recent years, radio frequency circuits have developed rapidly in fields such as the Internet of Things and communication systems. As a control component of radio frequency circuits, radio frequency switches have also attracted much attention. Commonly used radio frequency switches mainly include transistor switches and micromechanical switches. Although the switching speed of the transistor switch is fast, it has disadvantages such as large on-resistance, small off-resistance, and low applicable power; while the micromechanical switch has better performance than a res...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03K17/94
CPCH03K17/94
Inventor 王伟周嘉
Owner FUDAN UNIV
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