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Load module cover opening structure

A load module and cover structure technology, applied in the field of load module cover opening structure, can solve the problems of lifting force, time-consuming and labor-intensive opening of the upper cover plate, and achieve simple and practical load module cover opening structure, stable mechanism movement, and high degree of automation Effect

Inactive Publication Date: 2017-05-03
PIOTECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the inside of the cavity is in a vacuum state, the upper cover plate is usually stuck to the cavity sealing ring, so the opening of the upper cover plate requires a lifting force, and it is time-consuming and labor-intensive to open the cover manually

Method used

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  • Load module cover opening structure
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Embodiment Construction

[0013] Below in conjunction with embodiment the present invention is further described in detail, but invention protection content is not limited to described embodiment:

[0014] refer to Figure 1-2 , a load module cover opening structure, the cover opening structure includes a cover plate 1, a curved connecting rod 2, a load cavity 3, a cylinder 4, a straight connecting rod 5 and a cylinder liner 6; the cover plate 1 and the load cavity The body 3 is connected with the straight connecting rod 5 through the curved connecting rod 2, and the two cylinder liners 6 are respectively fixedly installed on both sides of the upper surface of the load cavity 3, and the two sides of the upper cover plate 1 are respectively fixed with the cylinder 4, The cylinder 4 is inserted into the cylinder liner 6 and connected flexibly.

[0015] There are two straight connecting rods 5 .

[0016] The cylinder 4 is telescopic in the cylinder liner 6 .

[0017] When closed, each structure of the ...

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Abstract

The invention discloses a load module cover opening structure and mainly solves the problems of high time consumption and high effort consumption by a manual cover opening manner adopted by the existing load module cover opening structure. The load module cover opening structure comprises an upper cover plate, a curved connection rod, a load cavity, a cylinder, a straight connection rod and a cylinder sleeve. The load module cover opening structure is simple and practical, is high in automation degree, large in opening and closing angles and stable in mechanism movement; through the load module cover opening structure, the cover opening time is reduced, and the productivity is improved.

Description

technical field [0001] The invention relates to a load module opening structure, which belongs to the application technical field of semiconductor thin film equipment. Background technique [0002] In semiconductor film preparation equipment, the load module needs to open the cavity regularly to clean the cavity. Since the inside of the cavity is in a vacuum state, the upper cover plate is usually stuck to the cavity sealing ring, so lifting force is required to open the upper cover plate, and it is time-consuming and labor-intensive to open the cover plate manually. Therefore, there is a need for a load module opening structure that has a larger opening and closing angle, realizes automatic opening, saves opening time, and improves production efficiency. Contents of the invention [0003] In order to solve the above problems, the present invention provides a load module cover opening structure. The cover opening structure adopts a four-bar mechanism to rotate and open an...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/00C23C16/00
CPCC23C14/00C23C16/00
Inventor 杜广宇廉杰方仕彩
Owner PIOTECH CO LTD
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