On-chip modulation integrated optical resonant cavity
An optical resonant cavity and integrated optics technology, applied in the fields of optical communication and inertial navigation, can solve problems such as the inability to greatly improve the degree of integration, influence, and stability limitations of the system integration system, so as to enhance system reliability and simplify the system model , The effect of reducing system size and power consumption
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[0018] The present invention will be further described in detail with reference to the accompanying drawings and embodiments.
[0019] The invention provides an on-chip modulated integrated optical resonant cavity, which is suitable for applying the resonant cavity as an optical path system of a sensor / filter. The lithium niobate phase modulator is directly fabricated on the upper layer of the resonant cavity, which is the key device to realize the frequency locking of the resonant cavity; at the same time, the lithium niobate waveguide modulator outside the cavity realizes the modulation of the optical frequency entering the cavity, providing data reference for frequency locking.
[0020] The transmissive structure of the on-chip modulated integrated optical resonant cavity provided by the present invention is an integrated upper and lower two-layer structure, and the lithium niobate waveguide modulator is made on the upper layer of the resonant cavity. A resonant cavity and ...
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