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Narrow-linewidth and high-performance tunable optical detector based on non-periodic sub-wavelength grating

A sub-wavelength grating and photodetector technology, applied in the field of optoelectronics, can solve the problems of difficult to obtain distributed Bragg reflectors, refractive index difference, etc., and achieve reduced constraints, high speed and quantum efficiency, and high frequency response bandwidth Effect

Inactive Publication Date: 2017-02-22
BEIJING UNIV OF POSTS & TELECOMM
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Problems solved by technology

However, since traditional semiconductor devices are mainly made of indium phosphide (InP) materials, the refractive index difference is small, and it is difficult to obtain a distributed Bragg reflector (DBR) with practical value, so as to realize a resonant cavity with a large enhancement effect.

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  • Narrow-linewidth and high-performance tunable optical detector based on non-periodic sub-wavelength grating
  • Narrow-linewidth and high-performance tunable optical detector based on non-periodic sub-wavelength grating
  • Narrow-linewidth and high-performance tunable optical detector based on non-periodic sub-wavelength grating

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Embodiment Construction

[0020] With reference to the embodiments of the present invention and the accompanying drawings, the structure and technical solutions in the embodiments of the present invention will be fully and clearly described below. This embodiment is only one of some embodiments of the present invention, not all of them. All other embodiments obtained by persons of ordinary skill in the art on the basis of the embodiments of the present invention without making creative efforts belong to the protection scope of the present invention.

[0021] see figure 1 , the narrow linewidth tunable high-performance photodetector based on the aperiodic sub-wavelength grating of the present invention is grown on a gallium arsenide (GaAs) substrate, and the bottom mirror 2, the filter cavity 5, and the filter cavity are sequentially formed from bottom to top. The filter cavity top mirror 3, the absorption cavity 6, and the non-periodic sub-wavelength grating oblique mirror 4 constitute a structure of ...

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Abstract

The invention proposes a narrow-linewidth and high-performance tunable optical detector based on a non-periodic sub-wavelength grating, and relates to the technical field of photoelectron. The high-performance optical detector comprises a filtering cavity bottom lens (DBR), a filtering cavity, a filtering cavity top lens (DBR), an absorption cavity and a non-periodic sub-wavelength grating oblique reflection mirror from bottom to top. In the optical detector, the optical cavity length is changed by electric tuning or thermal tuning to achieve a selective tuning function of wavelength; and the non-periodic sub-wavelength grating inclined reflection mirror is used for achieving oblique reflection on incident light at different angles for many times, so that the incident light can be repeatedly absorbed by an absorption layer, and the high-speed and high-quantum efficiency performance of a device is achieved. The optical detector has the characteristics of narrow linewidth, high quantum efficiency, high frequency response bandwidth and the like, is easy to integrate and is tunable, and can be widely applied to the field of optical communication and optical signal processing.

Description

technical field [0001] The invention relates to the field of optoelectronic technology, in particular to a narrow line width tunable high-performance photodetector which uses a non-periodic sub-wavelength grating to realize multiple reflection functions. Background technique [0002] With the continuous development of the information age, data transmission with larger capacity and longer distance has become the goal that people are constantly pursuing. Since the transformation and progress of optical communication systems and networks often depend on the development of materials, processes and structures of devices, therefore, in the face of the severe challenges of increasing high-speed optical communication business requirements, it is necessary to effectively improve the key optoelectronic devices in optical communication systems. performance will become an effective way. [0003] In optical communication systems, photodetectors with high speed and high quantum efficienc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/0232H01L31/105
CPCH01L31/02327H01L31/105
Inventor 段晓峰李宫清黄永清刘凯尚玉峰任晓敏
Owner BEIJING UNIV OF POSTS & TELECOMM
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