Narrow-linewidth and high-performance tunable optical detector based on non-periodic sub-wavelength grating
A sub-wavelength grating and photodetector technology, applied in the field of optoelectronics, can solve the problems of difficult to obtain distributed Bragg reflectors, refractive index difference, etc., and achieve reduced constraints, high speed and quantum efficiency, and high frequency response bandwidth Effect
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[0020] With reference to the embodiments of the present invention and the accompanying drawings, the structure and technical solutions in the embodiments of the present invention will be fully and clearly described below. This embodiment is only one of some embodiments of the present invention, not all of them. All other embodiments obtained by persons of ordinary skill in the art on the basis of the embodiments of the present invention without making creative efforts belong to the protection scope of the present invention.
[0021] see figure 1 , the narrow linewidth tunable high-performance photodetector based on the aperiodic sub-wavelength grating of the present invention is grown on a gallium arsenide (GaAs) substrate, and the bottom mirror 2, the filter cavity 5, and the filter cavity are sequentially formed from bottom to top. The filter cavity top mirror 3, the absorption cavity 6, and the non-periodic sub-wavelength grating oblique mirror 4 constitute a structure of ...
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