Three-dimensional morphology measurement method for inhibiting speckles on the basis of wide-spectrum laser

Abstract

The invention discloses a three-dimensional morphology measurement method for inhibiting speckles on the basis of wide-spectrum laser. The method comprises the following steps: a step of outputting a wide-spectrum laser source to the surface of a measured object for scanning; a step of extracting center point pixel coordinates of light spots of scanned images; and a step of converting the center point pixel coordinates to obtain three-dimensional point-cloud data of the measured object. According to the method, the wide-spectrum light source is output when a laser is at a coherent collapse state, for carrying out accurate three-dimensional surface morphology measurement, such that the speckles are effectively inhibited from a hardware perspective, the technical problem that high-frequency useful information in the images are filtered is solved, the image sharpness is improved, and the application field is wide.

Description

technical field [0001] The invention relates to the technical field of photoelectric measurement and detection, in particular to a three-dimensional shape measurement method based on broad-spectrum laser suppression of speckles. Background technique [0002] Due to the constraints of environmental temperature, processing method, machine tool precision and other factors, the workpiece size may be out of tolerance in all aspects of workpiece production. Therefore, it is of great significance to realize the closed-loop control of workpiece production and improve the product qualification rate to accurately measure the three-dimensional topography of the workpiece surface, remove unqualified workpieces in time, and feed back the defect information to the upstream foundry. Among them, for the measurement of flexible or inaccessible objects, non-contact measurement technology is widely used due to its significant advantages such as high precision, high efficiency, and surface non-...

AI Technical Summary

Problems solved by technology

[0004] Aiming at the technical problems existing in the prior art, the present invention provides a three-dimensional topography measurement method based on broad-spectrum laser suppression of speckle. The method uses the laser in a coherent collapsed state to output a wide-spectrum light source for accurate three-dimensional surface topography measurement, and then From the perspective of hardware, it realizes effective suppression of speckle and solves the technical problem of filtering out high-frequency useful information in images, improves image clarity, and has a wide range of applications.

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