Diamond crystal, diamond element, magnetic sensor, magnetic measurement device, and method for manufacturing sensor array

Abstract

Provided is a technique for making two-dimensional magnetic measurement with high sensitivity possible at normal temperature in the atmosphere. The diamond crystal pertaining to the present invention is characterized by having an NV region including a complex (NV center) of nitrogen substituted for a carbon atom and a vacancy adjacent to the nitrogen on or near the surface thereof, the NV region having a donor concentration equal to or greater than the concentration of the NV center, or the crystal in the NV region being the (111) face or a face having an off angle no more than + / -10 degrees of the (111) face, and the principal axis of the NV center being a < 111 > axis orthogonal to the (111) face. Through such a diamond crystal, substantially 100% of the NV center can be placed in a negatively charged state (NV-), the spin state of the NV- center can be aligned in one direction, and ODMR signal peaks also become sharp. Through the sensor array pertaining to the present invention, the NV center generated in the diamond crystal can be maintained in the negatively charged state (NV-).

Description

technical field [0001] The present invention relates to a technique for enabling highly sensitive magnetic measurement, and more specifically, to a diamond crystal capable of highly sensitive magnetic measurement at room temperature and in the atmosphere, a magnetic sensor using the diamond crystal, and the like. Background technique [0002] Diamond can be said to be a specific crystal lattice in which the color center in the crystal behaves like "trapped atoms in low temperature and vacuum" at room temperature and in the atmosphere. The nitrogen-vacancy complex (NV center) formed in diamond as such a specific lattice is a kind of color center, such as figure 1 As shown, with nitrogen (N) replacing carbon and an atomic vacancy (V) located ortho to this nitrogen, has spin S=1. [0003] The NV center traps electrons while the NV in a negatively charged state - The center is unique in solids, and can operate and detect single spins using light at room temperature. It has the...

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Problems solved by technology

[0005] For the NV in the ground state - Red fluorescence is emitted when the center is irradiated with green light, but when the ground state has an electron spin of |1> or |-1>, some of the excited electrons return to the ground state through the singlet state, so it is difficult to generate fluorescence process

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