X-ray sensor and manufacturing method thereof

Abstract

The invention relates to an X-ray sensor and a manufacturing method thereof. The X-ray sensor comprises a sensing substrate and a lead glass substrate, wherein the sensing substrate is provided with a plurality of sensing units; the lead glass substrate comprises a first surface and a second surface which are opposite; the first surface is fixed on the sensing substrate and a plurality of grooves which correspond to the plurality of sensing units one by one are formed in the second surface; the lead glass substrate also comprises a first reflecting layer, scintillator fluorescent powder and a second reflecting layer; the first reflecting layer is arranged on the side walls of the plurality of grooves; the plurality of grooves are filled with the scintillator fluorescent powder; and the second reflecting layer is arranged on the second surface. According to the X-ray sensor provided by the invention, the damage of an X ray to the plurality of sensing units can be effectively blocked through a method of adding lead glass between the scintillator fluorescent powder and the plurality of sensing units; and furthermore, the lead glass has relatively high penetration rate and a high refractive index, so that optical interference caused by light scattering can also be effectively reduced.

Description

technical field [0001] The invention relates to an X-ray sensor and a manufacturing method thereof, in particular to a low-damage X-ray sensor and a manufacturing method thereof. Background technique [0002] X-ray images are an important tool in medical diagnosis. Digital X-ray imaging is increasingly replacing traditional photographic X-ray film. Digital X-ray imaging has two important reference indicators, which are sensitivity and resolution that affect image quality. The thicker the scintillator is, the better it is to increase the sensitivity; however, the visible light emitted by the scintillator will cause optical interference, and the resolution of the image will decrease. [0003] In order to solve the above problems, the industry has made the scintillator into a microstructure to improve the sensitivity and resolution of the image quality, please refer to figure 1 . The X-ray sensor 100 includes a sensing substrate 110, a plurality of sensing units 120, an adh...

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Problems solved by technology

[0005] In order to solve the above-mentioned problem that the sensing unit is damaged by direct irradiation of X-rays on the sensing unit, the present invention provides an X-ray sensor

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