A heating device used in scanning electron microscope

Abstract

The invention provides a heating device applied to a scanning electron microscope. The device comprises a sample crucible, a heating core ceramic, an electric heating wire and a heat radiation shielding structure, wherein the sample crucible is placed on an upper end of the heating core ceramic, the electric heating wire is wound around a surface of the heating core ceramic in a double helical manner, the heating core ceramic is heated, and the electric heating wire is made of a doped tungsten filament; the heat radiation shielding structure comprises an internal stainless steel shielding layer, a secondary external stainless steel shielding layer, an external stainless steel shielding layer, an upper stainless steel shielding layer, a secondary upper stainless steel shielding layer and a shielding base seat; inter-layer space between the internal stainless steel shielding layer, the secondary external stainless steel shielding layer and the external stainless steel shielding layer is filled with vacuum; a diameter ratio between the above three layers is determined via a heat loss equation. The heating device provided in the invention is high in heating efficiency, small in size and good in shielding effects; a problem that a conventional heating device affects normal work of the scanning electron microscope is overcome.

Description

technical field [0001] The invention relates to the field of rapid heating, in particular to a heating device applied in a scanning electron microscope. Background technique [0002] Scanning electron microscopy is one of the main tools and means for the observation and research of the microstructure of metal materials. For materials such as superalloys, we need to study their microstructures at high temperatures and the microstructure of superalloys during long-term high-temperature creep. The evolution process of the organization has led to the rapid development of the heating table accessories of the scanning electron microscope, such as the heating table accessories of the Hitachi company, the heating table accessories of the FEI company, etc., but these commercial heating tables are generally relatively large in size and low in heating efficiency. Low heat generation, high heat generation, and poor heat insulation effect, which put the scanning electron microscope aroun...

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Problems solved by technology

[0002] Scanning electron microscopy is one of the main tools and means for the observation and research of the microstructure of metal materials. For materials such as superalloys, we need to study their microstructures at high temperatures and the microstructure of superalloys during long-term high-temperature creep. The evolution process of the organization has led to the rapid development of the heating table accessories of the scanning electron microscope, such as the heating table accessories of the Hitachi company, the heating table accessories of the FEI company, etc., but these commercial heating tables are generally relatively large in size and low in heating efficiency. Low heat generation, poor heat insulation effect, which puts the scanning electron microscope around the heating device in a strong thermal field, which seriously affects the normal operation of the scanning electron microscope

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