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A non-evaporable adsorption pump activated by electric heating

An adsorption pump and non-evapotranspiration technology, which is applied in the direction of heating element materials, heating element shapes, pumps, etc., can solve the problems that the low-temperature condensation pump cannot be coupled and installed, the pumping area cannot be directly installed, and the vacuum degree cannot be maintained, etc. The time to achieve is short , high efficiency and low heating power consumption

Active Publication Date: 2018-06-22
LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The system now uses a built-in liquid nitrogen cryogenic condensation pump to pump out a large amount of water vapor to achieve the required vacuum degree. However, it was found during the test that when the high-energy ion beam is working, a large amount of gas will be generated due to high heat and ionization. Especially hydrogen, unable to maintain the original vacuum
The survey found that the non-evaporable getter is an effective way to solve the instantaneous large amount of gas, especially hydrogen, but most of the existing non-evaporable getters on the market are made into the structure of the getter sheet installed on the heating tube. The block suction piece is a group to form a commercial adsorption pump cavity, which is packaged in a vacuum chamber. Additional installation space is required for installation. The effective suction area cannot be directly installed in the part that needs to be pumped, and cannot be condensed with the existing low temperature Pump coupling installation

Method used

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  • A non-evaporable adsorption pump activated by electric heating
  • A non-evaporable adsorption pump activated by electric heating
  • A non-evaporable adsorption pump activated by electric heating

Examples

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Embodiment 1

[0030] Such as Figure 1~3 As shown, a non-evaporable adsorption pump activated by electric heating, the adsorption pump mainly includes an adsorption unit, a heater and an installation interface 4;

[0031] Wherein, the adsorption unit is composed of an adsorption belt 9 and an adsorption material attached to the adsorption belt 9; the installation interface 4 is a vacuum-sealed hollow structure, and an electrical connector 3 is arranged in the cavity;

[0032] The adsorption units are arranged alternately with the heater, and the adsorption units are in conflict with the heater; the heating element 5 of the heater is electrically connected to the electrical connector 3 in the installation interface 4 .

[0033] Further, the adsorption pump also includes a support assembly, which is composed of a heat insulation ring 12, a support ring 13, an upper support rib 10 and a lower support rib 11; wherein, the upper support rib 10 and the lower support rib 11 are Processed with ins...

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Abstract

The invention discloses a non-evaporable type adsorption pump utilizing electric heating activation, and belongs to the field of vacuum obtaining and maintaining. The adsorption pump comprises an adsorption unit, a heater and a mounting interface; the adsorption unit is composed of an adsorption belt and an adsorption material attached on the adsorption belt; the mounting interface is a vacuum sealed hollow structure; an electric connector is arranged in a cavity of the mounting interface; the adsorption unit and the heater are arranged in a spaced manner, and the adsorption unit abuts against the heater; and a heating element of the heater is electrically connected to the electric connector in the mounting interface. According to the adsorption pump disclosed by the invention, the adsorption unit and the heater are arranged in the spaced manner, so that the adsorption material is in sufficient contact with a hating tube, and therefore, time for reaching a needed activation temperature is short, heating power loss is low and efficiency is high.

Description

technical field [0001] The invention relates to a non-evaporative adsorption pump, which belongs to the field of vacuum acquisition and maintenance. Background technique [0002] A vacuum system requires high vacuum conditions in the transmission path of high-energy ion beams to reduce beam losses. The system now uses a built-in liquid nitrogen cryogenic condensation pump to pump out a large amount of water vapor to achieve the required vacuum degree. However, it was found during the test that when the high-energy ion beam is working, a large amount of gas will be generated due to high heat and ionization. Especially hydrogen, cannot maintain the original vacuum degree. The survey found that the non-evaporable getter is an effective way to solve the instantaneous large amount of gas, especially hydrogen, but most of the existing non-evaporable getters on the market are made into the structure of the getter sheet installed on the heating tube. The block suction piece is a g...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04B37/14F04B39/00F04B39/06F04B41/06H05B3/12H05B3/18H05B3/40
CPCF04B37/14F04B39/00F04B39/06F04B41/06H05B3/12H05B3/18H05B3/40
Inventor 陈联李得天成永军裴晓强孙冬花黄宏冯天佑李莉
Owner LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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