An arc power supply for a high-current ion source

Abstract

The invention discloses an arc power supply for a high-current ion source. The arc power supply comprises a power supply unit and an ion source output end for outputting arc current, wherein the power supply supplies the iron source output end with electricity through a DC / DC converter; an asymmetric H-bridge topological structure is adopted by the DC / DC converter and comprises four bridge arms; the first bridge arm and the second bridge arm are connected with a positive electrode of the ion source output end separately and a third bridge arm and a fourth bridge arm are connected with a negative electrode of the ion source output end separately; the first bridge arm is provided with at least two BUCK converters which are connected in a phase dislocation manner; a diode in each BUCK converter is shared by the second bridge arm; the third bridge arm is provided with an insulated gate bipolar transistor; and the fourth bridge arm is provided with one diode. By the arc power supply for the high-current ion source disclosed by the invention, di / dt of a system is greatly improved, so that, on one hand, a pit digging operation can be finished without arranging a current transfer circuit, and on the other hand, 0-100% of pit digging depth is continuously adjustable and the current pit digging width is not limited by time any more.

Description

technical field [0001] The invention relates to an arc power supply, in particular to an arc power supply for a high-current ion source. Background technique [0002] The arc power supply for the ion source needs to perform arc cratering operation when the high-voltage power supply system is put into operation or ignition, that is, the arc current needs to be rapidly reduced to a certain level and maintained for a specified period of time when the high-voltage power supply system is put into operation or ignited. , and then rise rapidly to return to the normal arc current, the extent of the current drop is the depth of the pit, and the maintenance time after the current drops is the width of the pit. [0003] If the power supply system has a sufficiently large current change rate di / dt, it will be beneficial to realize the rapid response of the system, and then be able to meet the requirements of the aforementioned pitting operation. However, the current status quo is that t...

AI Technical Summary

Problems solved by technology

[0005] The technical problem solved by the present invention is that the adjustment accuracy and adjustment range of the pit depth and the pit width are limited by the inherent characteristics of the circuit, and there is almost no difficulty in reducing the difficulty of the closed-loop control of the system. Therefore, it provides an arc power supply for high-current ion sources that can continuously adjust the depth of the current crater from 0 to 100%, the width of the current crater is no longer limited by time, and it is beneficial to reduce the difficulty of closed-loop control.

[0006] The invention further solves the problem of poor stability of the arc power source affected by the power grid

Images