Measuring system and method for vibration parameters of scanning galvanometer

Abstract

The invention relates to a system and method for measuring the vibration parameters of a scanning galvanometer to solve the problems of small angle measuring range, low frequency response, low precision and the like in the prior art. The measurement system includes an integrating sphere light source, a first off-axis parabolic reflector, a second off-axis parabolic reflector, a single-point detector, a signal acquisition unit and a timing device. A sinusoidal grating is placed at the light exit of the integrating sphere light source; the first off-axis parabolic reflector is located on the outgoing light path of the integrating sphere light source; the second off-axis parabolic reflector is located on the outgoing light path of the first off-axis parabolic reflector; The scanning galvanometer is located on the outgoing optical path of the second off-axis parabolic mirror; the single-point detector is located at the converging point of the reflected beam of the scanning galvanometer to receive the sinusoidal grating image; The motor is synchronized with the signal acquisition time of the single-point detector, and the time corresponding to each angular position of the scanning galvanometer to be tested is given; the signal acquisition unit is used to read the output signal of the single-point detector.

Description

technical field [0001] The invention belongs to the field of photoelectric measurement, and relates to a measurement system and a measurement method of vibration parameters of a scanning galvanometer. Background technique [0002] The scanning galvanometer is referred to as the galvanometer, which is mainly composed of a control motor and a reflector. The control motor drives the reflector to reciprocate at a high speed around its axis of rotation. Galvo mirrors are widely used in laser processing and medical fields to control the laser action time to achieve controllable laser energy. Recently, galvanometers have also been used to compensate the image shift of the imaging camera due to the scene or its own motion, so that the imaging camera can obtain an imaging effect equivalent to staring during the movement. The inaccuracy of the vibration angular velocity of the galvanometer will lead to blurred images, which will greatly affect the imaging effect of the camera. [00...

AI Technical Summary

Problems solved by technology

[0004] The measurement of the vibration parameters of the existing galvanometer is mostly based on a high-precision tracking system to achieve non-contact measurement, but the angle measurement range of the system is not large, and the frequency response is low; while other measurement systems based on the principle of precision angle measurement, although The measurement speed is fast, the precision is high, and the ability to resist environmental interference is strong, but it is usually necessary to install auxiliary devices on the galvanometer, and the intervention of the auxiliary device will affect the dynamic performance of the galvanometer itself

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