Relative humidity sensor device based on nano coaxial cavity structure and surface plasmon effect and manufacturing method thereof

A surface plasmon and relative humidity technology, applied in nanotechnology, instruments, scientific instruments, etc., can solve problems such as difficult to make nano-patterns, and achieve the effect of tight combination, strong applicability, and not easy to fall off

Inactive Publication Date: 2016-10-26
NANJING UNIV OF INFORMATION SCI & TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the current nanosphere printing method is still difficult to produce nano-patterns with complex structures.

Method used

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  • Relative humidity sensor device based on nano coaxial cavity structure and surface plasmon effect and manufacturing method thereof
  • Relative humidity sensor device based on nano coaxial cavity structure and surface plasmon effect and manufacturing method thereof
  • Relative humidity sensor device based on nano coaxial cavity structure and surface plasmon effect and manufacturing method thereof

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Embodiment Construction

[0030] The present invention will be further described below in conjunction with specific examples.

[0031] In this embodiment, the steps of preparing a coaxial cavity relative humidity sensor are as follows:

[0032] a) Take a glass slide 1-8 with a length of 7.5 cm and a width of 2.5 cm, and clean it with acetone (purity 99.7%), alcohol (purity 99.9%), deionized water (resistivity 18.2MΩ) ultrasonic (40W) for 10 Minutes, then blow dry with nitrogen gas (purity 99.7%); Then use plasma cleaner to treat slide glass for 5 minutes;

[0033] b) fixing the processed glass slides 1-8 with a custom-made container 2-1;

[0034] c) Configure SiO 2 Precursor solution of SiO 2 The mass of each substance in the precursor solution is: TEOS (98wt%)=1g, 0.1M / L HCl=1g, EtOH (100%)=1.5g, mix and stir for one hour for later use;

[0035] d) Configure polystyrene (PS) colloidal solution, 30ml, the diameter of colloidal microspheres 3-8 is 690nm, the deviation rate of microsphere diameter is...

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Abstract

The invention discloses a relative humidity sensor device based on a nano coaxial cavity structure and a surface plasmon effect and a manufacturing method thereof. The main structure is a nano metal coaxial cavity array, and the coaxial cavities are filled with gel and reflective fiber optic probes. The humidity sensing principle is that the reflective index of gel filled in the coaxial cavities is influenced by the relative humidity of surrounding environment; the micro change of reflective index in coaxial cavities will cause the deviation of harmonic peak of plasmon on the inner surface of coaxial cavities, and in the reflectance spectrum, the deviation is the deviation of minimal value of reflection. The wavelengths of minimal values of the reflectance spectrum and relative humidifies are in a one-to-one correspondence relationship, and thus the relative humidity can be calculated according to the wavelength of minimal value of reflection. The manufacturing method comprises the following steps: adopting a nano sphere self-assembling method to produce a single layer composite microsphere array, carrying out etching and film plating to form a coaxial cavity array, and finally evenly filling gel into the cavities. The provided relative humidity sensor device is an all-optical work device, and is capable of realizing all-optical sensing network.

Description

technical field [0001] The invention relates to a micro-nano structure photoelectric sensor element based on the surface plasmon effect, in particular to a dimension-nano-scale device for relative humidity sensing and a preparation method thereof. Background technique [0002] The miniaturization of sensor devices has always been the goal that people are striving for. Reducing the size of photoelectric sensor devices to the nanometer scale is the direction that researchers are working hard at present. [0003] Surface plasmon is a special electromagnetic wave mode that exists at the interface between metal and medium. It is the coupling of surface charge density wave and the electromagnetic wave excited by it, and it is a transverse wave. Photons can be localized to subwavelength dimensions using surface plasmons. Under the action of an external electric field, the interface between the metal and the medium can form a periodic distribution of surface charge density, and the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/47B82Y40/00
CPCG01N21/474B82Y40/00G01N2021/4742
Inventor 倪海彬刘清惓常建华王婷婷倪波
Owner NANJING UNIV OF INFORMATION SCI & TECH
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